Development of a MEMS electromagnetic optical scanner for a commercial laser scanning microscope

Journal of Microlithography, Microfabrication and Microsystems

Volumn 3, Issue 2, 2004, Pages 348-357

  Miyajima, Hiroshi ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Closed loop control; Electromagnetic; Hinge; Laser scanning microscope; Optical scanner; Reliability

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; ENERGY UTILIZATION; ENVIRONMENTAL IMPACT; MAGNETIC RESONANCE IMAGING; MICROELECTROMECHANICAL DEVICES; MICROSCOPIC EXAMINATION; MIRRORS; NATURAL FREQUENCIES; PERSONAL COMPUTERS; POLYIMIDES; RELIABILITY; SCANNING; SEMICONDUCTOR DEVICES; SILICON; SINGLE CRYSTALS; STIFFNESS;

ELECTROMAGNETIC; HINGE; LASER SCANNING MICROSCOPE; OPTICAL SCANNER;

OPTICAL SYSTEMS;

EID: 2542482906     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1666879     Document Type: Article

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