Multi-photon polymerization of inorganic-organic hybrid polymers using visible or IR ultra-fast laser pulses for optical or (opto-)electronic devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7591, Issue , 2010, Pages

  Steenhusen, Sönke ^a,b   Stichel, Thomas ^a,b   Houbertz, Ruth ^a   Sextl, Gerhard ^a,b  

^a FRAUNHOFER INSTITUTE FOR SILICATE RESEARCH ISC   (Germany)

^b UNIVERSITY OF WÜRZBURG   (Germany)

Author keywords

Hybrid polymers; Multi photon polymerization; Rapid prototyping; Two photon polymerization

Indexed keywords

3D STRUCTURE; [A] GROWTH MODELS; ACTIVE DEVICES; CHAIN PROPAGATION; DIFFRACTION LIMITS; DIRECT WRITING; ELECTRONIC DEVICE; FEMTOSECOND LASER PULSE; GOOD COMPATIBILITY; HIGH RESOLUTION; HYBRID POLYMERS; INORGANIC-ORGANIC HYBRID POLYMERS; INTEGRATED PASSIVES; KEY COMPONENT; MULTI-PHOTON POLYMERIZATION; MULTIPHOTONS; NONLINEAR BEHAVIOR; PHOTO-INITIATOR; PHOTOCHEMICAL PROCESS; PROCESSING TECHNIQUE; RADICAL DIFFUSION; SHARP THRESHOLD; THREE PHOTON ABSORPTION; TWO PHOTON POLYMERIZATION; ULTRAFAST LASER; VOXEL SIZE; Z-SCAN EXPERIMENT;

CONCURRENT ENGINEERING; JOB ANALYSIS; LIGHT; LIGHT ABSORPTION; ORGANIC LASERS; ORGANIC POLYMERS; PHOTOCHEMICAL REACTIONS; PHOTONS; POLYMERIZATION; POLYMERS; PULSED LASER APPLICATIONS; RAPID PROTOTYPING; SCANNING; SEMICONDUCTOR QUANTUM DOTS; THERMOELECTRIC EQUIPMENT; ULTRASHORT PULSES;

TWO PHOTON PROCESSES;

EID: 77951545402     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.852324     Document Type: Conference Paper

References (30)

1. Göppert-Mayer, M., "Über Elementarakte mit zwei Quantensprüngen," Annalen der Physik 401(3), 273-294 (1931).
2. Denk, W. and Svoboda, K., "Photon upmanship: Why multiphoton imaging is more than a gimmick," Neuron 18(3), 351-357 (1997). (Pubitemid 27138784)
3. Tanaka, T., Sun, H. B., and Kawata, S., "Rapid sub-diffraction-limit laser micro/nanoprocessing in a threshold material system," Applied Physics Letters 80(2), 312-314 (2002). (Pubitemid 34104612)
4. Maruo, S., Nakamura, O., and Kawata, S., "Three-dimensional microfabrication with two-photon-absorbed photopolymerization," Optics Letters 22(2), 132-134 (1997).
5. Schmidt, V., Kuna, L., Satzinger, V., Houbertz, R., Jakopic, G., and Leising, G., "Application of two-photon 3D lithography for the fabrication of embedded ORMOCER waveguides," Proc. of SPIE 6476, 64760P-1 (2007).
6. Serbin, J., Ovsianikov, A., and Chichkov, B., "Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties," Optics Express 12(21), 5221-5228 (2004).
7. Jia, B. H., Serbin, J., Kim, H., Lee, B., Li, J. F., and Gu, M., "Use of two-photon polymerization for continuous gray-level encoding of diffractive optical elements," Applied Physics Letters 90, 073503 (2007). (Pubitemid 46280736)
8. Claeyssens, F., Hasan, E. A., Gaidukeviciute, A., Achilleos, D. S., Ranella, A., Reinhardt, C., Ovsianikov, A., Xiao, S., Fotakis, C., Vamvakaki, M., Chichkov, B. N., and Farsari, M., "Three-dimensional biodegradable structures fabricated by two-photon polymerization," Langmuir 25(5), 3219-3223 (2009).
9. Kawata, S., Sun, H. B., Tanaka, T., and Takada, K., "Finer features for functional microdevices," Nature 412(6848), 697-698 (2001).
10. Haske, W., Chen, V. W., Hales, J. M., Dong, W. T., Barlow, S., Marder, S. R., and Perry, J. W., "65 nm feature sizes using visible wavelength 3-D multiphoton lithography," Optics Express 15(6), 3426-3436 (2007). (Pubitemid 46457205)
11. Li, J. F., Jia, B. H., and Gu, M., "Engineering stop gaps of inorganic-organic polymeric 3D woodpile photonic crystals with post-thermal treatment," Optics Express 16(24), 20073-20080 (2008).
12. Houbertz, R., Domann, G., Cronauer, C., Schmitt, A., Martin, H., Park, J. U., Frohlich, L., Buestrich, R., Popall, M., Streppel, U., Dannberg, P., Wachter, C., and Brauer, A., "Inorganic-organic hybrid materials for application in optical devices," Thin Solid Films 442(1-2), 194-200 (2003).
13. Haas, K. H., Amberg-Schwab, S., and Rose, K., "Functionalized coating materials based on inorganic-organic polymers," Thin Solid Films 351(1-2), 198-203 (1999). (Pubitemid 32213756)
14. Takada, K., Sun, H. B., and Kawata, S., "Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting," Applied Physics Letters 86(7), 071122 (2005).
15. Sun, H. B., Tanaka, T., and Kawata, S., "Three-dimensional focal spots related to two-photon excitation," Applied Physics Letters 80(20), 3673-3675 (2002).
16. "Gwyddion - Free SPM (AFM, SNOM/NSOM, STM, MFM) data analysis software."
17. 2 measurements," Optics Letters 14(17), 955-957 (1989).
18. Sheikbahae, M., Said, A. A., Wei, T. H., Hagan, D. J., and Vanstryland, E. W., "Sensitive measurement of optical nonlinearities using a single beam," IEEE Journal of Quantum Electronics 26(4), 760-769 (1990).
19. Van Stryland, E. W. and Sheikbahae, M., "Z-scan measurements of optical nonlinearities," in [ Characterization Techniques and Tabulations for Organic Nonlinear Materials], Kuzyk, M. and Dirk, C., eds., 655-692, Marcel Dekker, Inc., New York (1998).
20. Houbertz, R., Frohlich, L., Popall, M., Streppel, U., Dannberg, P., Brauer, A., Serbin, J., and Chichkov, B. N., "Inorganic-organic hybrid polymers for information technology: from planar technology to 3D nanostructures," Advanced Engineering Materials 5(8), 551-555 (2003).
21. Heller, C., Pucher, N., Seidl, B., Kalinyaprak-Icten, K., Ullrich, G., Kuna, L., Satzinger, V., Schmidt, V., Lichtenegger, H. C., Stampfl, J., and Liska, R., "One- and two-photon activity of cross-conjugated photoinitiators with bathochromic shift," Journal of Polymer Science Part a-Polymer Chemistry 45(15), 3280-3291 (2007). (Pubitemid 47209930)
22. Infuehr, R., Pucher, N., Heller, C., Lichtenegger, H., Liska, R., Schmidt, V., Kuna, L., Haase, A., and Stampfl, J., "Functional polymers by two-photon 3D lithography," Applied Surface Science 254(4), 836-840 (2007).
23. Seidl, B. and Liska, R., "Mechanistic investigations on a diynone type photoinitiator," Macromolecular Chemistry and Physics 208(1), 44-54 (2007). (Pubitemid 46191969)
24. Schafer, K. J., Hales, J. M., Balu, M., Belfield, K. D., Van Stryland, E. W., and Hagan, D. J., "Two-photon absorption cross-sections of common photoinitiators," Journal of Photochemistry and Photobiology A-Chemistry 162(2-3), 497-502 (2004).
25. http://www.georgehart.com/rp/rp.html.
26. http://www.eng.nus.edu.sg/LCEL/RP/u21/wwwroot/stl-library.htm.
27. Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B. N., Houbertz, R., Domann, G., Schulz, J., Cronauer, C., Frohlich, L., and Popall, M., "Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics," Optics Letters 28(5), 301-303 (2003).
28. Houbertz, R., Wolter, H., Dannberg, P., Serbin, J., and Uhlig, S., "Advanced packaging materials for optical applications: bridging the gap between nm-size structures and large-area panel processing," Photonic West 2006 - Invited Paper , 6126-5 (2006).
29. Houbertz, R., Domann, G., Schulz, J., Olsowski, B., Frohlich, L., and Kim, W. S., "Impact of photoinitiators on the photopolymerization and the optical properties of inorganic-organic hybrid polymers," Applied Physics Letters 84(7), 1105-1107 (2004).
30. Lu, C. G., Huang, W., Luan, J. F., Lu, Z. F., Qian, Y., Yun, B. F., Hu, G. H., Wang, Z. Y., and Cui, Y. P., "Study on the three-photon properties of a triphenylamine derivative with three conjugated branches," Optics Communications 281(15-16), 4038-4041 (2008).