Application of two-photon 3D lithography for the fabrication of embedded ORMOCER® waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6476, Issue , 2007, Pages

  Schmidt, V ^a   Kuna, L ^a   Satzinger, V ^a   Houbertz, R ^b   Jakopic, G ^a   Leising, G ^a,c  

^a JOANNEUM RESEARCH   (Austria)

^b FRAUNHOFER INSTITUTE FOR SILICATE RESEARCH ISC   (Germany)

^c GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Inorganic organic hybrid polymer; Integrated optical interconnect; Ormocer ; Two photon 3D lithography; Waveguide

Indexed keywords

INTEGRATED OPTOELECTRONICS; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; PRINTED CIRCUIT MANUFACTURE; RAPID PROTOTYPING; EMBEDDED SYSTEMS; PHOTONS; PRINTED CIRCUIT BOARDS;

DIRECT LASER WRITING; INTEGRATED OPTICAL INTERCONNECTS; ORMOCER WAVEGUIDES; TWO-PHOTON 3D LITHOGRAPHY (2P-3DL); INORGANIC-ORGANIC HYBRID POLYMERS; TWO-PHOTON 3D LITHOGRAPHY;

PRINTED CIRCUIT BOARDS; WAVEGUIDES;

EID: 34248662112     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.724908     Document Type: Conference Paper

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