Distributed MEMS tunable matching network using minimal-contact RF-MEMS varactors

IEEE Transactions on Microwave Theory and Techniques

Volumn 54, Issue 6, 2006, Pages 2646-2657

  Shen, Qin ^a,b   Barker, N Scott ^a,b  

^a IEEE   (United States)

^b UNIVERSITY OF VIRGINIA   (United States)

Author keywords

Distributed microelectromechanical system (MEMS) transmission line (DISITL); RF MEMS; Tunable matching network

Indexed keywords

CAPACITANCE RATIO; DISTRIBUTED MICROELECTROMECHANICAL SYSTEM TRANSMISSION LINE (DISITL); SMITH CHART; TUNABLE MATCHING NETWORK;

CAPACITANCE MEASUREMENT; COMPUTER SIMULATION; ELECTRIC LINES; VARACTORS; VOLTAGE DISTRIBUTION MEASUREMENT;

MEMS;

EID: 33748788886     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2006.872943     Document Type: Article

References (26)

1. Q. Shen and N. S. Barker, "Reconfigurable matching with a 10-30 GHz distributed RF-MEMS tuner," in Proc. Asia-Pacific Microw, Conf., Suzhou, China, Dec. 4-7, 2005.
2. J. Papapolymerou, K. L. Lange, C. L. Goldsmith, A. Malczewski, and J. Kleber, "Reconfigurable double-stub tuners using MEMS switches for intelligent RF front-ends," IEEE Trans. Microw. Theory Tech., vol. 51, no. 1, pp. 271-278, Jan. 2003.
3. S. Jung, K. Kang, J.-H. Park, K.-W. Chung, Y.-K. Kim, and Y. Kwon, "Micromachined frequency variable impedance tuners using resonant unit cells," in IEEE MTT-S Int. Microw. Symp. Dig., Phoenix, AZ, May 20-25, 2001, vol. 1, pp. 333-336.
4. T. Vähä-Heikkilä, J. Varis, J. Tuovinen, and G. M. Rebeiz, "A reconfigurable 6-20 GHz RFMEMS impedance tuner," in IEEE MTT-S Int. Microw. Symp. Dig., Fort Worth, TX, Jun. 6-11, 2004, vol. 2, pp. 729-732.
5. T. Vähä-Heikkilä and G. M. Rebeiz, "A 20-50 GHz reconfigurable matching network for power amplifier applications," in IEEE MTT-S Int. Microw. Symp. Dig., Fort Worth, TX, Jun. 6-11, 2004, vol. 2, pp. 717-720.
6. T. Vähä-Heikkilä and G. M. Rebeiz, "A 4-18 GHz reconfigurable RF MEMS matching network for power amplifier applications," Int. J. RF Microw. Comput.-Aided Eng., vol. 15, no. 4, pp. 205-207, Apr. 2005.
7. T. Vähä-Heikkilä, J. Varis, J. Tuovinen, and G. M. Rebeiz, "A 20-50 GHz RF MEMS single-stub impedance tuner," IEEE Microw. Wireless Compon. Lett., vol. 14, no. 7, pp. 356-372, Jul. 2004.
8. Y. Lu, L. P. B. Katehi, and D. Peroulis, "High-power MEMS varactors and impedance tuners for millimeter-wave applications," IEEE Trans. Microw. Theory Tech., vol. 53, no. 11, pp. 3672-3678, Nov. 2005.
9. J. Cusack, S. Perlow, and B. Perlman, "Automatic load contour mapping for microwave power transistors," IEEE Trans. Microw. Theory Tech., vol. MTT-22, no. 12, pp. 1146-1152, Dec. 1974.
10. G. L. Ragan, Microwave Transmission Circuits. New York: McGraw-Hill, 1948, pp. 466-472.
11. N. S. Barker and G. M. Rebeiz, "Distributed MEMS true-time delay phase shifters and wide-band switches," IEEE Trans. Microw. Theory Tech., vol. 46, no. 11, pp. 1881-1890, Nov. 1998.
12. N. S. Barker, "Distributed MEMS transmission lines'," Ph.D. dissertation, Elect. Comput. Eng. Dept., Univ. Michigan at Ann Arbor, Ann Arbor, MI, 1999.
13. G. E. Ponchak, "Development of passive components for millimeter-wave circuits," Ph.D. dissertation, Elect. Comput. Eng. Dept., Univ. Michigan at Ann Arbor, Ann Arbor, MI, 1997.
14. Z. J. Yao, S. Chen, S. Eshelman, D. Denniston, and C. Goldsmith, "Micromachined low-loss microwave switches," J. Microelectromech. Syst., vol. 8, no. 2, pp. 129-134, Jun. 1999.
15. C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, and M. Eberly, "Lifetime characterization of capacitive RF MEMS switches," in IEEE MTT-S Int. Microw. Symp. Dig., Phoenix, AZ, May 20-25, 2001, vol. 1, pp. 227-230.
16. Q. Shen, I. Chasiotis, and N. S. Barker, "RF-MEMS varactor with minimal contact," in Proc. ASME/STLE Int. Joint Tribol. Conf. (in pt. A), Long Beach, CA, Oct. 24-27, 2004, vol. 1, pp. 41-45.
17. P. Blondy, A. Crunteanu, C. Champeaux, A. Catherinot, P. Tristant, O. Vendier, J. L. Cazaux, and L. Marchand, "Dielectric less capacitive MEMS switches," in IEEE MTT-S Int. Microw. Symp. Dig., Fort Worth, TX, Jun. 6-11, 2004, vol. 2, pp. 573-576.
18. L. Dussopt and G. M. Rebeiz, "Intermodulation distortion and power handling in RF MEMS switches, varactors, and tunable filters," IEEE Trans. Microw. Theory Tech., vol. 51, no. 4, pp. 1247-1256, Apr. 2003.
19. Q. Shen, "8-50 GHz distributed MEMS tunable matching network using minimal contact RF-MEMS varactors," Ph.D. dissertation, Elect. Comput. Eng. Dept., Univ. of Virginia, Charlottesville, VA, 2005.
20. J. S. Hayden and G. M. Rebeiz, "Very low-loss distributed X-band and K a-band MEMS phase shifters using metal-air-metal capacitors," IEEE Trans. Microw. Theory Tech., vol. 51, no. 1, pp. 309-314, Jan. 2003.
21. H. T. Kim, J.-H. Park, Y.-K. Kim, and Y. Kwon, "V-band low-loss and low-voltage distributed MEMS digital phase shifter using metal-air-metal capacitors," in IEEE MTT-S Int. Microw. Symp. Dig., Seattle, WA, Jun. 2-7, 2002, vol. 1, pp. 341-344.
22. M. J. Rodwell, S. T. Allen, R. Y. Yu, M. G. Case, U. Bhattacharya. M. Reddy, E. Carmen, M. Kamegawa, Y. Konishi, J. Pusl, and R. Pullela, "Active and nonlinear propagation devices in ultrafast electronics and optoelectronics," Proc. IEEE, vol. 82, no. 7, pp. 1037-1059, Jul. 1994.
23. Q. Shen and N. S. Barker, "A reconfigurable RF MEMS based double slug impedance tuner," in Proc. 35th Eur. Microw. Conf., Paris, France, Oct. 3-7, 2005, pp. 537-540.
24. Maxwell 3D, Ver. 9. Ansoft Corporation, Pittsburgh, PA, 2002.
25. Microwave Office 2002. Appl. Wave Res. Inc., El Segundo, CA, 2002.
26. Advanced Design System (ADS). Agilent Technol., Palo Alto, CA, 2003.