MEMS variable capacitor actuated with an electrically floating plate

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 431-434

  Young, Jun Yoon ^a   Hyung, Suk Lee ^a   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; COMPOSITE MICROMECHANICS; ELECTRIC CURRENTS; ELECTRIC EQUIPMENT; ELECTRON DEVICES; ELECTROSTATIC ACCELERATORS; ELECTROSTATIC ACTUATORS; ENERGY STORAGE; MEMS; MICROELECTROMECHANICAL DEVICES;

CONTROL VOLTAGES; ELECTROSTATIC ACTUATIONS; MEMS VARIABLE CAPACITORS; Q FACTORS; RF SIGNALS; TUNING RATIO;

DIELECTRIC DEVICES;

EID: 50249121948     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418965     Document Type: Conference Paper

References (7)

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6. G.K. Fedder, "Simulation of Microelectromechanical Systems," Ph. D. thesis, University of California at Berkeley, CA, 1994
7. A. Dec and K. Suyama, "Micromachined electro-mechanically tunable capacitors and their applications to RF IC's," Microwave Theory and Tech., vol. 46, pp. 2587-2596, Dec. 1998