Low-voltage large-value tunable capacitors using self-aligned harpss

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 319-322

  Rais Zadeh, M ^a   Samarao, A K ^a   Monajemi, P ^a   Ayazi, F ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MECHANICS; TUNING;

CONTINUOUS TUNING; DIFFERENT SIZES; HIGH ASPECT RATIO; LOW VOLTAGES; SELF-ALIGNED; SILICON MICROFABRICATION; TUNABLE CAPACITORS; TUNING VOLTAGES;

MEMS;

EID: 50149085331     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443657     Document Type: Conference Paper

References (5)

1. C. Tsai, et al., "An isolated tunable capacitor with linear capacitance-voltage behaviour," Transducers 2003, Boston, MA, June 2003, pp. 833-836.
2. D. McCormick, et al., "Ultra-wide tuning range silicon MEMS capacitors on glass with tera-ohm isolation and low parasitics," Transducers 2005, Seoul, Korea, June 2005, pp. 1075- 1079.
3. F. Ayazi and K. Najafi, "High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology," IEEE Journal of Microelectromechanical Systems, Vol. 9, pp. 288-294, Sept. 2000.
4. P. Monajemi and F. Ayazi, "A high-Q low-voltage HARPSS tunable capacitor," IEEE IMS '05, Long Beach, CA, June 2005, pp. 749-752.
5. S. Pourkamali, et al., "High-Q single crystal silicon HARPSS capacitive beam resonators with sub-micron transduction gaps," IEEE Journal of Microelectromechanical Systems, Vol. 12, No. 4, pp. 487-496, August 2003.