Density change upon crystallization of amorphous Zr-Cu-Al thin films

Acta Materialia

Volumn 58, Issue 10, 2010, Pages 3633-3641

  Guo, Qiang ^a,b,c   Noh, Joo Hyon ^d   Liaw, Peter K ^d   Rack, Philip D ^d   Li, Yi ^a,c   Thompson, Carl V ^a,b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b USA   (United States)

^c NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^d University of Tennessee   (United States)

Author keywords

Crystallization; Metallic glasses; Thin films

Indexed keywords

AL THIN FILMS; ALLOY COMPOSITIONS; DEFLECTION MEASUREMENT; DENSITY CHANGE; DEPOSITION METHODS; EUTECTIC SYSTEM; GENERAL TRENDS; GLASS-FORMING COMPOSITIONS; GLOBAL MINIMA; MACROSCOPIC PLASTICITY; MICRO-CANTILEVERS;

ALUMINUM; AMORPHOUS FILMS; COPPER; CRYSTALLIZATION; DEPOSITION; EUTECTICS; GLASS; THIN FILMS; ZIRCONIUM; ZIRCONIUM ALLOYS;

METALLIC GLASS;

EID: 77951025568     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2010.02.033     Document Type: Article

References (47)

1. L Greer A., and Ma E. Mater Res Bull 32 (2007) 611
2. Li Y., Poon S.J., Shiflet G.J., Xu J., Kim D.H., and Löffler J.F. Mater Res Bull 32 (2007) 624
3. Inoue A. Acta Mater 48 (2000) 279
4. Wang W.H., Dong C., and Shek C.H. Mater Sci Eng R44 (2004) 45
5. Inoue A., and Nishiyama N. Mater Res Bull 32 (2007) 651
6. Greer A.L. Nature 366 (1993) 303
7. Wang D., Li Y., Sun B.B., Sui M.L., Lu K., and Ma E. Appl Phys Lett 84 (2004) 4029
8. Xu D., Lohwongwatana B., Duan G., and Johnson W.L. Acta Mater 52 (2004) 2621
9. Wang D., Tan H., and Li Y. Acta Mater 53 (2005) 2969
10. Yu P., Bai H.Y., and Wang W.H. J Mater Res 21 (2006) 1674
11. Kumar G., Ohkubo T., Mukai T., and Hono K. Scripta Mater 57 (2007) 173
12. Das J., Tang M.B., Kim K.B., Theissmann R., Baier F., Wang W.H., and Eckert J. Phys Rev Lett 94 (2005) 205501
13. Chen L.Y., Fu Z.D., Zhang G.Q., Hao X.P., Jiang Q.K., Wang X.D., et al. Phys Rev Lett 100 (2008) 075501
14. Sheng H.W., Luo W.K., Alamgir F.M., Bai J.M., and Ma E. Nature 26 (2006) 419
15. Lee J.C., Par K.W., Kim K.H., Fleury E., Lee B.J., Wakeda M., et al. J Mater Res 22 (2007) 3087
16. Lu B.C., Yao J.H., Xu J., and Li Y. Appl Phys Lett 94 (2009) 241913
17. Miracle D.B., Egami T., Flores K.M., and Kelton K.F. Mater Res Bull 32 (2007) 629
18. Cheng Y.Q., Ma E., and Sheng H.W. Phys Rev Lett 102 (2009) 245501
19. Mukherjee S., Schroers J., Zhou Z., Johnson W.L., and Rhim W.-K. Acta Mater 52 (2004) 3689
20. Yavari A.R. Phys Lett 95A (1983) 165
21. Yavari A.R., and Inoue A. Mater Res Soc Symp Proc 554 (1999) 21
22. Park K., Jang J., Wakeda M., Shibutani Y., and Lee J. Scripta Mater 57 (2007) 805
23. Li Y., Guo Q., Kalb J.A., and Thompson C.V. Science 322 (2008) 1816
24. Guo Q., Li M., Li Y., Shi L., Chong T.C., Kalb J.A., et al. Appl Phys Lett 93 (2008) 221907
25. Kalb J.A., Guo Q., Zhang X., Li Y., Sow C., and Thompson C.V. J Microelectromech Syst 17 (2008) 1094
26. Yu P., Bai H.Y., Tang M.B., and Wang W.L. J Non-Cryst Solids 351 (2005) 1328
27. Inoue A., Negishi T., Kimura H.M., Zhang T., and Yavari A.R. Mater Trans 39 (1998) 318
28. Schumacher H., Herr U., Oelgeschlaeger D., Traverse A., and Samwer K. J Appl Phys 82 (1997) 155
29. Xu D.H., Duan G., and Johnson W.L. Phys Rev Lett 92 (2004) 245502
30. Inoue A., and Zhang W. Mater Trans 11 (2002) 2921
31. Jun S.-I., Rack P.D., Mcknight T.E., Melechko A.V., and Simpson M.L. J Appl Phys 97 (2005) 054906
32. Fowlkes J.D., Fitz-Gerald J.M., and Rack P.D. Thin Solid Films 510 (2006) 68
33. Inoue A., Zhang T., and Masumoto T. J Non-Cryst Solids 150 (1992) 396
34. Inoue A., Kawase D., Tsai A.P., Zhang T., and Masumoto T. Mater Sci Eng A178 (1994) 255
35. Floro J.A., Hearne S.J., Hunter J.A., Kotula P., Chason E., Seel S.C., et al. J Appl Phys 89 (2001) 4886
36. Mayr S.G., and Samwer K. Phys Rev Lett 87 (2001) 036105
37. Guo H., and Lal A. J Microelectromech Syst 12 (2003) 53
38. Sentruria S.D. Microsystems design (2001), Kluwer Academic Publishers. p. 196
39. Deng Y.P., Guan Y., Fowlkes J.D., Wen S.Q., Pharr G.M., Liu F., et al. Intermetallics 15 (2007) 1208
40. Wang W.H. J Appl Phys 99 (2006) 093506
41. Miracle D.B. Acta Mater 54 (2006) 4317
42. Miracle D.B. Nat Mater 3 (2004) 697
43. Liu Y.H., Liu C.T., Wang W.H., Inoue A., Sakulai T., and Chen M.W. Phys Rev Lett 103 (2009) 065504
44. Cheng Y.Q., Cao Al.J., Sheng H.W., and Ma E. Acta Mater 56 (2008) 5263
45. Lewandowski J.J., Wang W.H., and Greer A.L. Philos Mag Lett 85 (2005) 77
46. Wang J.Q., Wang W.H., Yu H.B., and Bai H.Y. Appl Phys Lett 94 (2009) 121904
47. H. Yang, Y. Li, unpublished.