Separation of scanning error motions for surface profile measurement of aspheric micro lens

International Journal of Manufacturing Research

Volumn 1, Issue 3, 2006, Pages 267-282

  Gao, Wei ^a   Shibuya, Atsushi ^a   Yoshikawa, Yasuo ^a   Kiyono, Satoshi ^a   Park, C H ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

axial motion; error motion; error separation; measurement; micro lens; reversal; slide; spindle; surface profile; tilt motion

Indexed keywords

EID: 47049123432     PISSN: 17500591     EISSN: 17500605     Source Type: Journal    
DOI: 10.1504/IJMR.2006.011958     Document Type: Article

References (19)

1. Arai, Y, Gao, W., Shimizu, H., Kiyono, S. and Kuriyagawa, T. (2004) ‘On-machine measurement of aspherical surface profile’, Nanotechnology and Precision Engineering, Vols. 2-3, pp.210–216.
2. Chen, W.K., Kuriyagawa, T., Huang, H. and Yosihara, N. (2005) ‘Machining of micro aspherical mould inserts’, Precision Engineering, Vol. 29, pp.315–323.
3. Eric, J., Seibel, M.F., Janet, C-B., Quinn, YJ.S. and Brown, C.M. (xxxx) ‘Microfabricated optical fiber with microlens that produces large field of-view, video rate, optical beam scanning for microendoscopy applications’, Paper presented at the Proceedings of SPIE, Vol. 4957, pp.46–55. In proceedings.
4. Donaldson, R.R. (1972) ‘A simple method for separating spindle error from test ball roundness error’, Annals of CIRP, Vol. 21, pp.125–126.
5. Evans, C.J., Hocken, R.J. and Estler, W.T. (1996) ‘Self-calibration: reversal, redundancy, error separation, and absolute testing’, Annals of the CIRP, Vol. 45, pp.617–634.
6. Fankhauser, F. and Kwasniewska, S. (2004) ‘Cyclodestructive procedures – II Optical fibers, endoscopy, physics: a review’, Ophthalmologica, Vol. 218, pp.147–161.
7. Firestone, GC. and Yi, A.2005) ‘Precision compression molding of glass microlenses and microlens arrays – an experimental study’, Applied Optics, Vol. 44, pp.6115–6122.
8. Gao, W., Kiyono, S. and Nomura, T. (1996) ‘A new multi-probe method of roundness measurements’, Precision Engineering, Vol. 19, pp.37–45.
9. Gao, W., Kiyono, S. and Sugawara, T. (1997) ‘High accuracy roundness measurement by a new error separation method’, Precision Engineering, Vol. 21, pp.123–133.
10. Gao, W, Yokoyama, J., Kojima, H. and Kiyono, S. (2002) ‘Precision measurement of cylinder straightness using a scanning multi-probe system’, Precision Engineering, Vol. 26, pp.279–288.
11. Greivenkamp, J.E. and Gappinger, R.O. (2004) ‘Design of a nonnull interferometer for aspheric wave fronts’, Applied Optics, Vol. 43, pp.5143–5151.
12. Hill, M., Jung, M. and McBride, J.W. (2002) ‘Separation of form from orientation in 3D measurements of aspheric surfaces with no datum’, Int. J. Machine Tools & Manufacture, Vol. 42-, pp.457–466.
13. Lee, H.J. and Kim, S.W. (1999) ‘Precision profile measurement of aspheric surfaces by improved Ronchi test’, Optical Engineering, Vol. 38, pp.1041–1047.
14. Lee, C.O., Park, K., Park, B.C. and Lee, YW. (2005) ‘An algorithm for stylus instruments to measure aspheric surfaces’, Measurement Science & Technology, Vol. 16, pp.1215–1222.
15. Milton, G, Gharbia, Y and Katupitiya, J. (2005) ‘Mechanical fabrication of precision microlenses on optical fiber endfaces’, Optical Engineering, Vol. 44, Art. No. 123402.
16. Shan, X.C., Maeda, R. and Murakoshi, Y (2003) ‘Micro hot embossing for replication of microstructures’, Japanese Journal of Applied Physics Part 1, Vol. 42, pp.3859–3862.
17. Tomlinson, R., Coupland, J.M. and Petzing, J. (2003) ‘Synthetic aperture interferometry: in-process measurement of aspheric optics’, Applied Optics, Vol. 42, pp.701–707.
18. Venkatesh, VC. (2003) ‘Precision manufacture of spherical and aspheric surfaces on plastics, glass, silicon and germanium’, Current Science, Vol. 84, pp.1211–229.
19. Whitehouse, D.J. (1976) ‘Some theoretical aspects of error separation techniques in surface metrology’, Journal of Physics E: Scientific Instruments, Vol. 9, pp.531–536.