Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 9, Issue 2, 2010, Pages

  Holmes, Matthew R ^a   Shang, Tao ^a   Hawkins, Aaron R ^a   Rudenko, Mikhail ^b   Measor, Philip ^b   Schmidt, Holger ^b  

^a Department of Electrical and Computer Engineering   (United States)

^b University of California Santa Cruz   (United States)

Author keywords

Antiresonant reflecting optical waveguide; Focused ion beam; Microfluidic channels; Micropore; Nanopore; Optical loss

Indexed keywords

CIRCULAR WAVEGUIDES; FEATURE EXTRACTION; FLUIDIC DEVICES; FOCUSED ION BEAMS; IONS; MICROFLUIDICS; NANOPORES; OPTICAL WAVEGUIDES; SILICON NITRIDE;

ANTIRESONANT REFLECTING OPTICAL WAVEGUIDE; ANTIRESONANT REFLECTING OPTICAL WAVEGUIDES; MICROFLUIDIC CHANNEL; MICROPORE; MICROPORES;

MICROPOROSITY;

EID: 77950639657     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3378152     Document Type: Article

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