Visible electroluminescence from silicon nanoclusters embedded in chlorinated silicon nitride thin films

Thin Solid Films

Volumn 518, Issue 14, 2010, Pages 3891-3893

  Alonso, J C ^a   Pulgarin F A ^a   Monroy, B M ^a   Benami, A ^a   Bizarro, M ^a   Ortiz, A ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

Luminescence; Nanostructures; Plasma processing and deposition; Silicon; Silicon nitride

Indexed keywords

ACTIVE LAYER; AL CONTACT; ELECTRON HOLE PAIRS; ELECTRON IMPACT-IONIZATION; PLASMA PROCESSING AND DEPOSITION; PYROSOL PROCESS; REMOTE PLASMAS; SILICON NANOCLUSTERS; SILICON NANOCRYSTALS; SILICON NITRIDE THIN FILMS; TRANSPARENT CONDUCTIVE; TURN ON VOLTAGE; ZNO;

DEPOSITION; ELECTROLUMINESCENCE; IMPACT IONIZATION; LIGHT; NANOCLUSTERS; PLASMA DEPOSITION; PLASMA DEVICES; SILICON NITRIDE; THIN FILMS; ZINC OXIDE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77950608233     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.11.060     Document Type: Article

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