Low-plasma and high-temperature PECVD grown silicon-rich SiOx film with enhanced carrier tunneling and light emission

Nanotechnology

Volumn 18, Issue 39, 2007, Pages

  Lin, Gong Ru ^a   Lin, Chun Jung ^a   Lin, Cheng Tao ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ELECTROLUMINESCENCE; ELECTRON TUNNELING; ENERGY DISSIPATION; LIGHT EMISSION; NANOCRYSTALS; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; STOICHIOMETRY; THIN FILMS;

FOWLER-NORDHEIM TUNNELING FIELD; JUNCTION POTENTIAL BARRIER; MOSLED; PRIMARY ELECTRON; THRESHOLD PLASMA POWER;

SILICON;

METAL OXIDE; NANOCRYSTAL; OXYGEN; SILICON; SILICON DIOXIDE; TIN DERIVATIVE;

ARTICLE; CHEMICAL COMPOSITION; ELECTRON; FILM; HIGH TEMPERATURE; LIGHT; LIGHT EMITTING DIODE; LUMINESCENCE; PHOTOLUMINESCENCE; PLASMA; PRIORITY JOURNAL; SAMPLE; STOICHIOMETRY; VAPOR;

EID: 34548538171     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/39/395202     Document Type: Article

References (18)

1. Pavesi L, Dal Negro L, Mazzoleni C, Franzo G and Priolo F 2000 Nature 408 440
2. Kalache B, Kosarev A I, Vanderhaghen R and Roca i Cabarrocas P 2003 J. Appl. Phys. 93 1262
3. Kondo M, Fukawa M, Guo L and Matsuda A 2000 J. Non-Cryst. Solids 266-269 84
4. Lin G-R and Lin C J 2004 J. Appl. Phys. 95 8482
5. Lin C J and Lin G-R 2005 IEEE J. Quantum Electron. 41 441
6. Cleland T A and Hess D W 1989 J. Electrochem. Soc. 136 3103
7. Bauer S H and Haberman J A 1978 IEEE J. Quantum Electron. 14 233
8. Schroder D K 1998 Semiconductor Material and Device Characterization 2nd edn (New York: Wiley)
9. Muttia P, Ghislotti G, Bertoni S, Bonoldi L, Cerofolini G F, Meda L, Grilli E and Guzzi M 1995 Appl. Phys. Lett. 66 851
10. Skuja L 1998 J. Non-Cryst. Solids 239 16
11. Hren J J, Goldstein J I and Joy D C 1979 Introduction to Analytical Electron Microscopy (New York: Plenum)
12. Lenzlinger M and Snow E H 1969 J. Appl. Phys. 40 278
13. Fowler R H and Nordheim L W 1928 Proc. R. Soc. A 119 173
14. Pananakakis G, Ghibaudo G, Kies R and Papadas C 1995 J. Appl. Phys. 78 2635
15. O'Dwyer J J 1973 The Theory of Electrical Conduction and Breakdown in Solids Dielectrics (Oxford: Clarendon)
16. Lu T Z, Alexe M, Scholz R, Talelaev V and Zacharias M 2005 Appl. Phys. Lett. 87 202110
17. Lin G-R, Lin C J, Lin C K, Chou L J and Chueh Y L 2005 J. Appl. Phys. 97 094306
18. Lin C J, Lee C K, Diau Eric W-G and Lin G-R 2006 J. Electrochem. Soc. 153 E25