Effects of Laser in situ annealing on crystal quality of NiSi film grown on Si(001) substrate

Thin Solid Films

Volumn 518, Issue 14, 2010, Pages 3646-3649

  Wan, Li ^a   Zhang, Xuefei ^a   Tang, Bo ^a   Ren, Yiming ^a   Cheng, Xinhong ^a   Xu, Dapeng ^a   Luo, Hijun ^a   Huang, Yunmi ^a  

^a WENZHOU UNIVERSITY   (China)

Author keywords

Electron beam evaporation; Laser annealing; Nickel silicide; NiSi; Raman spectroscopy

Indexed keywords

CRYSTAL QUALITIES; ELECTRON BEAM EVAPORATION; IN-SITU ANNEALING; LASER ANNEALING; LASER POWER; NICKEL SILICIDE; NISI FILMS; SI (001) SUBSTRATE; STRUCTURAL PHASE TRANSITION;

ANNEALING; ELECTRON BEAMS; EVAPORATION; NICKEL ALLOYS; PHASE TRANSITIONS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICIDES; SILICON; SUBSTRATES; SUPERCONDUCTING FILMS; THIN FILMS;

CRYSTAL ORIENTATION;

EID: 77950545100     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.084     Document Type: Article

References (15)

1. Murarka S.P. Silicides for VLSI Applications (1983), Academic Press, New York
2. Kittl J.A., Shiau W.T., Hong Q.Z., and Miles D. Microelectron. Eng. 50 (2000) 87
3. Morimoto T., Momose H.S., Iinuma T., Kunishima I., Suguro K., Okano H., Katakabe I., Nakajima H., Tsuchiaki M., Tsuchiaki M., Ono M., Katsumate Y., and Iwai H. Tech. Dig. Int. Electron Devices Meet. (1991) 654
4. Mangelinck D., Dai J.Y., Pan J.S., and Lahiri S.K. Appl. Phys. Lett. 75 (1999) 1736
5. Donthu S.K., Chi D.Z., Tripathy S., Wong A.S.W., and Chua S.J. Appl. Phys. A. 79 (2004) 637
6. Lee P.S., Mangelinck D., Pey K.L., Shen Z.X., Ding J., Osipowicz T., and See A. Electrochem.Solid-State lett. 3 (2000) 153
7. Nemanich R.J., Tsai C.C., Stafford B.L., Abelson J.R., and Sigmon T.W. Mater. Res. Soc. Symp. Proc. 25 (1983) 9
8. Lim E.H., Karunasiri G., Chua S.J., Shen Z.X., Wong H., Pey K.L., Lee K.H., and Chan L. Microelectron. Eng. 43 (1998) 611
9. Codella P.J., Adar F., and Liu Y.S. Appl. Phys. Lett. 46 (1985) 1076
10. Zhao F.F., Chen S.Y., Shen Z.X., Gao X.S., Zheng J.Z., See A.K., and Chan L.H. J. Vac. Sci. Technol. B 21 (2003) 862
11. Vuppuladhadium R., Jackson H.E., and Boyd J.T. J. Appl. Phys. 73 (1993) 7887
12. Peng Y.C., Fu G.S., Yu W., Li S.Q., and Wang Y.L. Semicond. Sci. Technol. 19 (2004) 759
13. Almendra A., Rodríguez A., Rodríguez T., Martín P., and Jimenez J. J. Raman Spectrosc. 33 (2002) 80
14. Hayes W., and Loudon R. Scattering of Light by Crystals (1978), Wiley, New York
15. Wan L., Tang B., Cheng X., Ren Y., Zhang X., Xu D., Luo H., and Huang Y. Phys. B 404 (2009) 2324