SCOPUS 정보 검색 플랫폼

Volumn 79, Issue 3, 2004, Pages 637-642

Micro-Raman spectroscopic investigation of NiSi films formed on BF 2+-, B+-and non-implanted (100)Si substrates

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN BOUNDARIES; INTERFACES (MATERIALS); ION IMPLANTATION; NICKEL COMPOUNDS; PHONONS; RAMAN SPECTROSCOPY; SUBSTRATES;

DOPANTS; POWDER SPECTRUM; SITE DENSITY;

THIN FILMS;

EID: 3042596597 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-002-2067-3 Document Type: Article

Times cited : (38)

References (11)

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