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Journal of Physics: Conference Series

Volumn 207, Issue , 2010, Pages

Dynamic effects in dual-frequency capacitively coupled discharges

(3) Voloshin, D a Proshina, O a Rakhimova, T a

a MOSCOW STATE UNIVERSITY (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

PHYSICS;

ANALYTIC MODELING; CAPACITIVELY COUPLED DISCHARGES; DISCHARGE CURRENTS; DYNAMIC EFFECTS; DYNAMIC STRUCTURE; MONTE CARLO COLLISION; SINGLE FREQUENCY; VOLTAGE WAVEFORMS;

MONTE CARLO METHODS;

EID: 77950490367 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/207/1/012026 Document Type: Conference Paper

Times cited : (6)

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