Extreme insulating ultrathin diamond films for SOD applications: From coalescence modelling to synthesis

Diamond and Related Materials

Volumn 19, Issue 5-6, 2010, Pages 413-417

  Lions, M ^a,c   Saada, S ^a   Bazin, B ^a   Pinault, M A ^b   Jomard, F ^b   Andrieu, F ^c   Faynot, O ^c   Bergonzo, P ^a  

^a DIF   (France)

^b LABORATOIRE DES SCIENCES DU CLIMAT ET DE L ENVIRONNEMENT   (France)

^c CEA GRENOBLE   (France)

Author keywords

Chemical vapor deposition (CVD); Coalescence modelling; Diamond; Dielectrical properties; Silicon on insulator (SOD); Thin films

Indexed keywords

BURIED LAYER; DIAMOND LAYERS; DIAMOND MATERIALS; DIAMOND NANOCRYSTALS; DIELECTRICAL PROPERTIES; ELECTRICAL RESISTIVITY; FULLY DEPLETED; GROWTH PROCESS; HIGH THERMAL CONDUCTIVITY; INSULATING PROPERTIES; LINEAR GROWTH; NUCLEATION DENSITIES; POLYCRYSTALLINE DIAMOND FILMS; PROCESSING TECHNOLOGIES; SILICON ON INSULATOR; SILICON-ON-INSULATOR (SOD); SURFACE COVERAGES; ULTRA-THIN;

CHEMICAL VAPOR DEPOSITION; COALESCENCE; DEPOSITION; DIAMONDS; ELECTRIC CONDUCTIVITY; FILM GROWTH; INSULATION; MATHEMATICAL MODELS; MICROSENSORS; NUCLEATION; ULTRATHIN FILMS;

DIAMOND FILMS;

EID: 77950368330     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2010.01.018     Document Type: Article

References (16)

1. Mazellier J.P., Faynot O., Cristoloveanu S., Deleonibus S., and Bergonzo P. Diamond Relat. Mater. 17 (2008) 1248
2. Aleksov A., Gobien J.M., Li X., Prater J.T., and Sitar Z. Diamond Relat. Mater. 15 (2006) 248
3. Pleskov Y.V., Krotova M.D., Ralchenko V.G., Khomich A.V., and Khmelnitskiy R.A. Electrochim. Acta 49 (2003) 41
4. Madaleno J.C., Trippe S.C., and Pereira L. Diamond Relat. Mater. 16 (2007) 926
5. Su Q., Lu J., Wang L., Liu J., Ruan J., Cui J., Shi W., and Xia Y. Solid-State Electron. 49 6 (2005) 1044
6. Zhang M., Xia Y., Wang L., Gu B., Su Q., and Lou Y. J. Crystal Growth 274 1-2 (2005) 21
7. Jany C., Tardieu A., Gicquel A., Bergonzo P., and Foulon F. Diamond Relat. Mater. 9 (2000) 1086
8. Bevilacqua M., Tumilty N., Chaudhary A., and Ye H. Material Research Society Symp. Proc (2008) 1039-P13-02
9. Lions M., Saada S., Mazellier J.-P., Andrieu F., Faynot O., and Bergonzo P. Phys. Status Solidi RRL 1-3 (2009)
10. Saada S., Pochet S., Rocha L., Arnault J.C., and Bergonzo P. Diamond Relat. Mater. 18 (2009) 707
11. Saada S., Arnault J.C., Rocha L., Bazin B., and Bergonzo P. Phys. Status Solidi A 205 (2008) 2121
12. Saada S., Arnault J.C., Tranchant N., Bonnauron M., and Bergonzo P. Phys. Status Solidi A 204 (2007) 2854
13. McNamara K.M., Gleason K.K., Vestyk D.J., and Butler J.E. Diamond Relat. Mater. 1 (1992) 1145
14. Ballutaud D., Jomard F., Kociniewski T., Rzepka E., Girard H., and Saada S. Diamond Relat. Mater. 17 (2008) 451
15. Ferrari A.C., and Robertson J. Phys. Rev. B 63 (2001) 121405
16. Nemanich R.J., Glass J.T., Lucovsky G., and Shroder R.E. J. Vac. Sci. Technol. A 6 (1988) 1783