Scaling effects for electromagnetic vibrational power generators

Microsystem Technologies

Volumn 13, Issue 11-12, 2007, Pages 1637-1645

  O'Donnell, Terence ^a   Saha, Chitta ^a   Beeby, Steve ^b   Tudor, John ^b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC COILS; ELECTRIC RESISTANCE; ELECTROMAGNETIC FIELD EFFECTS; MAGNETIC FIELDS; MICROFABRICATION; VIBRATION ANALYSIS;

COIL PARAMETERS; COIL RESISTANCE; ELECTROMAGNETIC VIBRATIONAL POWER GENERATORS;

ELECTRIC GENERATORS;

EID: 34249815859     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0363-0     Document Type: Conference Paper

References (18)

1. Andrews M, Harris I, Turner G (1993) A comparison of squeeze-film theory with measurements on a microstructure. Sens Actuators A 26:79-87
2. Beeby SP, Tudor MJ, Koukharenko E, White NM, O'Donnell T, Saha C, Kulkarni S, Roy S (2004) Power MEMS 2004 conference, Kyoto, Japan, November 28-30
3. Beeby SP, Tudor MJ, Torah RN, Koukharenko E, Roberts S, O'Donnell T, Saha C (2006) Macro and micro scale electromagnetic kinetic energy harvesting generators. In: Proceedings ofDTIP 2006, Stresa, April 26-28
4. Cugat O, Delamare J, Reyne G (2003) Magnetic micro-actuators and systems (MAGMAS), IEEE Trans Magnetics39, no. 5
5. El-hami M, Glynne-Jones P, White NM, Hill M, Beeby S, James E, Brown AD, Ross JN (2001) Design and fabrication of a new vibration-based electromechnical power generator. Sens Actuators A 92:335-342
6. Glynne-Jones P, Tudor MJ, Beeby SP, White NM (2003) An electromagnetic, vibration-powered generator for intelligent sensor systems. Sens Actuators A 100:344-349
7. Hao Z, Erbil A, Ayazi F (2003) An analytical model for support loss in micromachined beam resonators. Sens Actuators A 109:156-164
8. Hosaka H, Itao K, Kuroda S (1994) Evaluation of energy dissipation mechanisms in vibrational Microactuators. In: IEEE proceedings on MEMS workshop, pp 193-198
9. Johnson R, Barr A (1969) J Acoustic and internal damping in uniform beams. Mech Eng Sci 11(2):117-127
10. Landau L, Liftshitz E (1959) Fluid mechanics. Pergammon Press, New York
11. Liftshitz R, Roukes M (2000) Thermoelastic damping in micro and nanomechanical systems. Phys Rev B 61(8):5600-5609
12. McLyman WT (1988) Transformer and inductor design handbook, 2nd edn. Marcel Dekker, New York,
13. Mitcheson PD, Green TC, Yeatman EM, Holmes AS (2004) Architectures for vibration-driven micropower generators. J MEMS13(3):429-440
14. Pourkamali S, Hashimura A, Abdolvand R, Ho GK, Erbil A, Ayazi F (2003) High-Q single crystal silicon HARPSS capacitive beam resonators with self aligned sub-100-nm transduction gaps. J MEMS12(1):487-495
15. Roundy S, Wright PK, Rabaey J (2003) A study of low level vibrations as a power source for wireless sensor nodes. Comput Commun 26:1131-1141
16. Wen J. Li, Terry CH. Ho, Gordon MH Chan, Philip HW Leong, HY Wong (2000) Infrared signal transmission by a laser-micromachined vibration-induced power generator. 43rd IEEE symposium on circuits and systems, Michigan
17. Yang J, Ono T, Esashi MJ (2002) Energy dissipation in submicrometer thick single crystal silicon cantilevers. Micromech Sys 11(6):775-783
18. Zhang X, Tang WC (1994) Viscous air damping in laterally driven microresonators. In: IEEE proceedings on MEMS workshop, pp 199-204