A reduced three dimensional model for SAW sensors using finite element analysis

Sensors

Volumn 9, Issue 12, 2009, Pages 9945-9964

  El Gowini, Mohamed M ^a   Moussa, Walied A ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Aluminum nitride; Finite element analysis; Mems; Saw sensors; Surface acoustic waves

Indexed keywords

COMPUTATIONAL CAPACITY; EXPERIMENTAL FREQUENCIES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); SAW SENSORS; SURFACE ACOUSTIC WAVE SENSORS; SURFACE ACOUSTIC WAVES; THREE-DIMENSIONAL MODEL; TWO-DIMENSIONAL (2D) MODELS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ALUMINUM NITRIDE; MEMS; SENSORS; THREE DIMENSIONAL; WAVE PROPAGATION;

FINITE ELEMENT METHOD;

EID: 77950222554     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s91209945     Document Type: Article

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