3D FE simulation of H2 SAW gas sensor

Sensors and Actuators, B: Chemical

Volumn 111-112, Issue SUPPL., 2005, Pages 213-218

  Atashbar, Massood Z ^a   Bazuin, Bradley J ^a   Simpeh, M ^a   Krishnamurthy, S ^a  

^a Parkview Campus   (United States)

Author keywords

ANSYS; Hydrogen sensor; Palladium thin film; Surface acoustic wave; Three dimensional finite element (3D FE)

Indexed keywords

ACOUSTIC WAVE PROPAGATION; CHEMICAL SENSORS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; HYDROGEN; INSERTION LOSSES; LITHIUM NIOBATE; PALLADIUM; THIN FILMS;

ANSYS; HYDROGEN SENSORS; PALLADIUM THIN SENSORS; SURFACE ACOUSTIC WAVES; THREE-DIMENSIONAL FINITE ELEMENT (3D FE);

ACOUSTIC SURFACE WAVE DEVICES;

EID: 25144437518     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.06.054     Document Type: Conference Paper

References (13)

1. x J. Alloys Compd. 356-357 2003 372 376
2. V.I. Anisimkin, I.M. Kotelyanskii, V.I. Fedosov, C. Caliendo, P. Verardi, and E. Verona Analysis of the different contributions to the response of SAW gas sensors Proceedings of the IEEE Ultrasonics Symposium 1995 515 518
3. K. Yamanaka, S. Ishikawa, N. Nakaso, N. Takeda, T. Mihara, and Y. Tsukahara Ball SAW device for hydrogen gas sensor Proceedings of the IEEE Ultrasonics Symposium 2003 299 302
4. R. Lerch Simulation of piezoelectric devices by two- and three-dimensional finite elements IEEE Trans. Ultrason. Ferroelectr. Frequency Control 37 2 1990 233 247
5. ANSYS 6.1 Documentation.
6. S.J. Ippolito, K. Kalantar-zadeh, D.A. Powell, and W. Wlodarski A three-dimensional finite element approach for simulating acoustic wave propagation in layered SAW devices Proceedings of the IEEE Ultrasonics Symposium 2003 303 306
7. I.V. Anisimkin, V.I. Anisimkin, Y.V. Gulyaev, R.G. Kryshtal, A.V. Medved, H.V. Phong, E. Verona, and V.E. Zemlyakov Surface acoustic wave sensors: new analytical capabilities Vestnik Moskovskogo Universiteta, Khimaya 41 6 2000 30 32
8. 3 layered SAW device for sensing Proceedings of the IEEE Ultrasonics Symposium 2003
9. K.-J. Bathe, E.L. Wilson, Numerical Methods in Finite Element Analysis, Prentice-Hall, Englewood Cliffs, NJ.
10. G. Xu Direct finite-element analysis of the frequency response of a Y-Z lithium niobate SAW filter Smart Mater. Struct. 9 2000 973 980
11. G. Xu Finite analysis element of second order effects on the frequency response of a SAW device Proceedings of the IEEE Ultrasonics Symposium 2000 187 190
12. E.C. Walter, F. Favier, and R.M. Penner Palladium mesowire arrays for fast hydrogen sensors and hydrogen-actuated switches Anal. Chem. 74 2002 1546 1553
13. F.A. Lewis The Palladium Hydrogen System 1967 Academic Press New York