3-D finite-element simulation model of SAW palladium thin film Hydrogen sensor

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2005, Pages 549-553

  Atashbar, M Z ^a   Bazuin, B J ^a   Simpeh, M ^a   Krishnamurthy, S ^a  

^a Parkview Campus   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANSYS; HYDROGEN SENSORS;

CHEMICAL SENSORS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; PALLADIUM; PERTURBATION TECHNIQUES; THIN FILMS; WAVE PROPAGATION;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 28744437064     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Lerch R., "Simulation of piezoelectric Devices by Two- and Three-Dimensional Finite Elements", IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control", Vol. 37, No. 2, pp 233-247, 1990.
2. Bathe K-J. and E.L. Wilson. "Numerical Methods in Finite Element Analysis", Prentice Hall. Englewood Cliffs, NJ.
3. Xu G., "Finite Analysis Element of Second Order Effects on the Frequency Response of a SAW Device," Proceedings of the IEEE Ultrasonics Symposium, pp 187-190, 2000.
4. Xu G., "Direct finite-element analysis of the frequency response of a Y-Z lithium niobate SAW filter", Smart Materials and Structures, Vol. 9, pp 973-980 ,2000.
5. Ippolito S. J., Kalantar-zadeh K., Powell D. A. and Wlodarski W., "A 3-Dimensional Finite Element Approach for simulating Acoustic Wave Propagation in Layered SAW Devices", Proceedings of the IEEE Ultrasonics Symposium, pp 303-306, 2003.
6. x" Journal of Alloys and Compounds 356-357, pp 372-376 2003.
7. Anisimkin V. I., Kotelyanskii I. M., Fedosov V. I., Caliendo C., Verardi P. and Verona E., "Analysis of the DifNoisemakingferent Contributions to the Response of SAW Gas Sensors", Proceedings of the IEEE Ultrasonics Symposium, pp 515-518, 1995.
8. Anisimkin I. V, Anisimkin V. I., Gulyaev Y. V., Kryshtal R. G., Medved A. V., Phong H. V., Verona E. and Zemlyakov V. E., "Surface Acoustic Wave Sensors: New analytical capabilities", Vestnik Moskovskogo Universiteta, Khimaya, Vol. 41, No. 6, pp 30-32, 2000.
9. Yamanaka K., Ishikawa S., Nakaso N., Takeda N., Mihara T. and Tsukahara Y., "Ball SAW Device for Hydrogen Gas Sensor", Proceedings of the IEEE Ultrasonics Symposium, pp 299-302, 2003.
10. 3 Layered SAW Device For Sensing", Proceedings of the IEEE Ultrasonics Symposium, 2003.