SCOPUS 정보 검색 플랫폼

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4407, Issue , 2001, Pages 423-430

Microwave frequency acoustic resonators implemented on monolithic Si/AlN substrates

(3) Caliendo, C a Verona, E a Cimmino, A a

a CNR Consiglio Nazionale delle Ricerche (Italy)

Author keywords

AlN; BAW resonators; Microwaves; SAW resonators; Thin films

Indexed keywords

ALUMINUM NITRIDE; COMPUTER SIMULATION; EQUIVALENT CIRCUITS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; PIEZOELECTRIC MATERIALS; Q FACTOR MEASUREMENT; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SURFACE WAVES; THIN FILMS;

PIEZOELECTRIC FILMS;

ACOUSTIC RESONATORS;

EID: 0034852038 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.425331 Document Type: Article

Times cited : (2)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.