SAW modes on ST-X quartz with an AlN layer

Materials Letters

Volumn 51, Issue 4, 2001, Pages 331-335

  Wu, Sean ^a   Wu, Long ^a   Chang, Jia Hua ^a   Chang, Feng Chih ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

AlN; c Axis oriented; GAW; HVPSAW; PSAW; Sputtering; ST quartz

Indexed keywords

ACOUSTIC WAVE VELOCITY; ALUMINUM NITRIDE; CRYSTAL ORIENTATION; PIEZOELECTRICITY; SPUTTERING; THERMODYNAMIC STABILITY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

HIGH SURFACE ACOUSTIC WAVES (HSAW);

QUARTZ;

EID: 0035500484     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(01)00313-5     Document Type: Article

References (16)