Oxidized Silicon-On-Insulator (OxSOI) from bulk silicon: A new photonic platform

Optics Express

Volumn 18, Issue 6, 2010, Pages 5785-5790

  Sherwood Droz, Nicolás ^a   Gondarenko, Alexander ^a   Lipson, Michal ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSENSORS; SILICON OXIDES;

BULK SILICON; CMOS FABRICATION; OXIDIZED SILICON; SILICON ON INSULATOR; WAVEGUIDE LOSS;

CMOS INTEGRATED CIRCUITS;

SILICON;

ARTICLE; CHEMISTRY; ELECTRIC CONDUCTIVITY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; OXIDATION REDUCTION REACTION; PHOTON; REFRACTOMETRY;

ELECTRIC CONDUCTIVITY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; OXIDATION-REDUCTION; PHOTONS; REFRACTOMETRY; SILICON;

EID: 77949577244     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.005785     Document Type: Article

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