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Volumn 363, Issue 6, 2010, Pages 1077-1083

Bis(cyclopentadienyl) zirconium(IV) amides as possible precursors for low pressure CVD and plasma-enhanced ALD

Author keywords

ALD; CVD; Zirconium amide; Zirconium carbide; Zirconium nitride

Indexed keywords

ADHESIVES; AMIDES; AMORPHOUS CARBON; CARBIDES; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; SUBSTRATES; VAPOR DEPOSITION; ZIRCONIA;

EID: 77949490035     PISSN: 00201693     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ica.2009.07.004     Document Type: Article
Times cited : (13)

References (42)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.