Differential amplification of structural perturbations in weakly coupled MEMS resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 57, Issue 3, 2010, Pages 690-697

  Thiruvenkatanathan, Pradyumna ^a   Yan, Jize ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATIVE APPROACH; AMBIENT PRESSURES; AMBIENT TEMPERATURES; COMMON MODE REJECTIONS; COUPLED RESONATOR; DIFFERENTIAL AMPLIFICATION; EIGENSTATES; MEMS RESONATORS; MICROMECHANICAL SENSORS; ORDERS OF MAGNITUDE; PARAMETRIC PERTURBATIONS; PARAMETRIC SENSITIVITY; RESONANT FREQUENCIES; RESONANT FREQUENCY SHIFT; SENSOR APPLICATIONS; SMALL PERTURBATIONS; STRUCTURAL PERTURBATION; ULTRA-HIGH; VIBRATION BEHAVIOR; VIBRATION LOCALIZATION;

AMPLIFICATION; MEMS; NATURAL FREQUENCIES; RESONATORS; SENSORS; STIFFNESS;

MICROELECTROMECHANICAL DEVICES;

EID: 77949403925     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2010.1466     Document Type: Conference Paper

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