Enhancing parametric sensitivity using mode localization in electrically coupled mems resonators

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2350-2353

  Thiruvenkatanathan, P ^a   Yan, J ^a   Lee, J E Y ^a   Seshia, A A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Electrical coupling; Mode localization; Parametric sensitivity; Resonator

Indexed keywords

COMMON MODE REJECTIONS; EIGEN STATE; EIGENSTATES; ELECTRICAL COUPLING; MECHANICAL SENSING; MEMS RESONATORS; MICROMECHANICAL RESONATOR; MODE LOCALIZATION; ORDERS OF MAGNITUDE; PARAMETRIC SENSITIVITY; RESONANT FREQUENCIES; SMALL PERTURBATIONS; VIBRATION LOCALIZATION; VIBRATIONAL ENERGIES; VOLTAGE-TUNABLE;

ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; RESONATORS; STIFFNESS;

SOLID-STATE SENSORS;

EID: 71449097760     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285444     Document Type: Conference Paper

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