Nonlinear vibration of micromachined asymmetric resonators

Journal of Sound and Vibration

Volumn 329, Issue 13, 2010, Pages 2547-2564

  Hassanpour, Pezhman A ^a   Esmailzadeh, Ebrahim ^b   Cleghorn, William L ^c   Mills, James K ^c  

^a UNIVERSITY OF WATERLOO   (Canada)

^b UNIVERSITY OF ONTARIO INSTITUTE OF TECHNOLOGY   (Canada)

^c UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL FORCES; COMB-DRIVE ACTUATOR; DIFFERENT ORIGINS; DYNAMIC BEHAVIORS; FORCED VIBRATION; FREE AND FORCED VIBRATIONS; GENERALIZED ORTHOGONALITY; GOVERNING EQUATIONS OF MOTION; INTERNAL RESONANCE; LUMPED MASS; MICROMACHINED; MODAL DAMPING; MODEL PARAMETERS; MULTIPLE SCALES METHODS; NON-LINEAR DYNAMICS; NON-LINEAR VIBRATIONS; PRIMARY RESONANCE; RESONANCE FREQUENCIES; RESONANT STRUCTURES; ROTARY INERTIAS; THIN BEAM;

AXIAL FLOW; ELECTROSTATIC ACTUATORS; EQUATIONS OF MOTION; RESONATORS;

RESONANCE;

EID: 77049099047     PISSN: 0022460X     EISSN: 10958568     Source Type: Journal    
DOI: 10.1016/j.jsv.2009.10.033     Document Type: Article

References (29)

1. Lobontiu N., and Garcia E. Mechanics of Microelectromechanical Systems (2005), Kluwer Academic, New York
2. Hassanpour P.A., Cleghorn W.L., Mills J.K., and Esmailzadeh E. Exact solution of the oscillatory behavior under axial force of a beam with a concentrated mass within its interval. Journal of Vibration and Control 13 12 (2007) 1723-1739
3. Hassanpour P.A., Cleghorn W.L., Esmailzadeh E., and Mills J.K. Vibration analysis of micro-machined beam-type resonators. Journal of Sound and Vibration 308 1-2 (2007) 287-301
4. P.A. Hassanpour, Design and Analysis of Micro-Electromechanical Resonant Structures, PhD Thesis, University of Toronto, Canada, 2008.
5. Turner K.L., Miller S.A., Hartwell P.G., MacDonald N.C., Strogatz S.H., and Adams S.G. Five parametric resonances in a microelectromechanical system. Nature 396 6707 (1998) 149-152
6. B.K. Hammad, A.H. Nayfeh, E. Abdel-Rahman, A subharmonic resonance-based MEMS filter, Proceedings of the ASME International Mechanical Engineering Congress and Exposition, 2007, pp. 303-312.
7. DeMartini B.E., Butterfield H.E., Moehlis J., and Turner K.L. Chaos for a microelectromechanical oscillator governed by the nonlinear Mathieu equation. Journal of Microelectromechanical Systems 16 6 (2007) 1314-1323
8. DeMartini B.E., Rhoads J.F., Turner K.L., Shaw S.W., and Moehlis J. Linear and nonlinear tuning of parametrically excited MEMS oscillators. Journal of Microelectromechanical Systems 16 2 (2007) 310-318
9. A.H. Nayfeh, M.I. Younis, E.M. Abdel-Rahman, Dynamic analysis of MEMS resonators under primary-resonance excitation, Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Vol. 1, Pts A-C, pp. 397-404, 2005, 20th Biennial Conference on Mechanical Vibration and Noise, Long Beach, CA, September 24-28, 2005.
10. Yu M.F., Wagner G.J., Ruoff R.S., and Dyer M.J. Realization of parametric resonances in a nanowire mechanical system with nanomanipulation inside a scanning electron microscope. Physical Review B 66 7 (2002)
11. Zhang W.H., Baskaran R., and Turner K.L. Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor. Sensors and Actuators A-Physical 102 1-2 (2002) 139-150
12. Zhang W.H., Baskaran R., and Turner K.L. Tuning the dynamic behavior of parametric resonance in a micromechanical oscillator. Applied Physics Letters 82 1 (2003) 130-132
13. Bahreyni B.H., and Shafai C. A resonant micromachined magnetic field sensor. IEEE Sensors Journal 7 9-10 (2007) 1326-1334
14. B.H. Bahreyni, Design, Modeling, Simulation, and Testing of Resonant Micromachined Magnetic Field Sensors, PhD Thesis, University of Manitoba, Canada, 2006.
15. Nayfeh A.H., and Mook D.T. Nonlinear Oscillations (1979), Wiley, New York
16. Ozkaya E., Pakdemirli M., and Oz H.R. Non-linear vibrations of a beam-mass system under different boundary conditions. Journal of Sound and Vibration 199 3 (1997) 679-696
17. Ozkaya E., Pakdemirli M., and Oz H.R. Non-linear vibrations of a beam-mass system under different boundary conditions-reply. Journal of Sound and Vibration 207 2 (1997) 286
18. Low K.H. Comments on "non-linear vibrations of a beam-mass system under different boundary conditions". Journal of Sound and Vibration 207 (1997) 284-286
19. P.A. Hassanpour, E. Esmailzadeh, W.L. Cleghorn, J.K. Mills, Generalized orthogonality condition for beams with intermediate lumped masses subjected to axial force, Journal of Vibration and Control, in press, doi:10.1177/1077546309106526.
20. Forehand D.I.M., and Cartmell M.P. On the derivation of the equations of motion for a parametrically excited cantilever beam. Journal of Sound and Vibration 245 1 (2001) 165-177
21. Ozkaya E., and Pakdemirli M. Non-linear vibrations of a beam-mass system with both ends clamped. Journal of Sound and Vibration 221 3 (1999) 491-503
22. Ozkaya E. Non-linear transverse vibrations of a simply supported beam carrying concentrated masses. Journal of Sound and Vibration 257 3 (2002) 413-424
23. Pakdemirli M., and Boyaci H. Non-linear vibrations of a simple-simple beam with a non-ideal support in between. Journal of Sound and Vibration 268 2 (2003) 331-341
24. Ozkaya E., and Tekin A. Non linear vibrations of stepped beam system under different boundary conditions. Structural Engineering and Mechanics 27 3 (2007) 333-345
25. Ramezani A., Alasty A., and Akbari J. Effects of rotary inertia and shear deformation on nonlinear free vibration of microbeams. Journal of Vibration and Acoustics-Transactions of the ASME 128 5 (2006) 611-615
26. Vyas A., Peroulis D., and Bajaj A.K. Dynamics of a nonlinear microresonator based on resonantly interacting flexural-torsional modes. Nonlinear Dynamics 54 1-2 (2008) 31-52
27. Thomson W.T., and Dahleh M.D. Theory of Vibration with Applications (1998), Prentice-Hall, Englewood Cliffs, NJ
28. Jacquot R.G., and Gibson J.D. The effects of discrete masses and elastic supports on continuous beam natural frequencies. Journal of Sound and Vibration 23 2 (1972) 237-244
29. Hibbeler R.C. Mechanics of Materials (2005), Pearson Prentice Hall, Upper Saddle River, NJ