Surface-enhanced cantilever sensors with nano-porous films

Acta Mechanica Solida Sinica

Volumn 23, Issue 1, 2010, Pages 1-12

  Duan, Huiling ^a  

^a Peking University   (China)

Author keywords

cantilever sensors; curvature; nano (micro ) porous films; resonance frequency; surface stress

Indexed keywords

CANTILEVER SENSORS; EIGEN-STRAIN; MICRO-CANTILEVERS; MICRO-SCALES; NANO-POROUS; NANO-POROUS FILMS; NANO-SCALE PORES; POROUS FILM; RESONANCE FREQUENCIES; SOLID FILMS; STATIC AND DYNAMIC; STATIC DEFORMATIONS; SURFACE LAYERS; SURFACE STRESS;

ADSORPTION; ATOMIC FORCE MICROSCOPY; DEFORMATION; NANOCANTILEVERS; NATURAL FREQUENCIES; SURFACE PROPERTIES;

NANOSENSORS;

EID: 77049087621     PISSN: 08949166     EISSN: 18602134     Source Type: Journal    
DOI: 10.1016/S0894-9166(10)60001-8     Document Type: Article

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