Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 857-862

  Chun, Dong Won ^a,b   Hwang, Kyo Seon ^a   Eom, Kilho ^a   Lee, Jeong Hoon ^c   Cha, Byung Hak ^a   Lee, Woo Young ^b   Yoon, Dae Sung ^a,d   Kim, Tae Song ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^d Yonsei University Wonju   (South Korea)

Author keywords

Analytical sensitivity; Microcantilever; Micromechanical mass detection; Resonant frequency

Indexed keywords

ELECTRIC VARIABLES MEASUREMENT; MEMS; MICROMECHANICS; NATURAL FREQUENCIES; OPTICAL RESOLVING POWER;

ANALYTICAL SENSITIVITY; HZ PER PICOGRAM; MICROMECHANICAL MASS DETECTION; PIEZOELECTRIC MICROCANTILEVERS;

GOLD;

EID: 34047114088     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.09.013     Document Type: Article

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