Large-area nanoperforated SiN membranes for optical and mechanical filtering

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1620-1622

  Viheriala J ^a   Niemi, T ^a   Laukkanen, J ^b   Karjalainen, M ^a   Pessa, M ^a  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

^b UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

Membrane; Nanoimprint lithography; Nanosieve; NIL; Optical fiber; Trough wafer via

Indexed keywords

FIBER COUPLINGS; FREESTANDING FILMS; GUIDED-MODE RESONANCE; MASS PRODUCIBLE; NANOPATTERNING; NANOSIEVE; NIL; OPTICAL ELEMENTS; REFRACTIVE INDEX SENSOR; SMALL AREA; SPATIAL PROPERTIES; TWO-COMPONENT;

FIBER OPTICS; FIBERS; MEMBRANES; NANOIMPRINT LITHOGRAPHY; OPTICAL DEVICES; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL MATERIALS; REFRACTIVE INDEX; REFRACTOMETERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; SILICON WAFERS;

FILTRATION;

FIBER OPTICS; FIBERS; FILTRATION; LITHOGRAPHY; MEMBRANES; OPTICAL MATERIALS; REFRACTIVITY; REFRACTOMETERS;

EID: 76949099854     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.10.033     Document Type: Article

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