Fabrication and characterization of nanoscale resonant gratings on thin silicon membrane

Optics Express

Volumn 17, Issue 7, 2009, Pages 4938-4943

  Wang, Yongjin ^a   Kanamori, Yoshiaki ^a   Ye, Jiasheng ^a   Sameshima, Hidehisa ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; FABRICATION; NANOTECHNOLOGY; SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

BURIED OXIDE LAYERS; DEEP REACTIVE ION ETCHING; FABRICATION AND CHARACTERIZATIONS; FAST ATOM BEAM ETCHINGS; FILTERING APPLICATIONS; POLARIZATION INDEPENDENT; SILICON ON INSULATOR WAFERS; THIN SILICON MEMBRANE;

REACTIVE ION ETCHING;

NANOMATERIAL; SILICON;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; NANOTECHNOLOGY; OPTICAL INSTRUMENTATION; REFRACTOMETRY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; ULTRASTRUCTURE;

COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; NANOSTRUCTURES; NANOTECHNOLOGY; OPTICAL DEVICES; REFRACTOMETRY; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SILICON;

EID: 65249161124     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.004938     Document Type: Article

References (23)

1. D. Rosenblatt, A. Sharon, A.A. Friesem, "Resonant grating waveguide structures," IEEE J.Quantum Electron. 33, 2038-2059(1997)
2. A.L, Fehrembach and A. Sentenac, "Unpolarized narrow-band filtering with resonant gratings," Appl. Phys. Lett., 86, 121105(2005)
3. D. Dobbs, 1. Gershkovich, B.T. Cunningham, "Fabrication of a graded wavelength guided mode resonant filter photonic crystal," Appl. Phys. Lett. 89, 123113(2006).
4. Alok. A.Mehta, Raymond C.Rumpf, Zachary A.Roth, Eric G.Johnson, "Guided mode resonance filter as a spectrally selective feedback element in a double-cladding optical fiber laser," IEEE Photon.Technol.Lett. 19,2030-2032(2007)
5. N.Ganesh, A. Xiang, N.B. Beltran, D.W. Dobbs, B.T. Cunningham, "Compact wavelength detection system incorporating a guided-mode resonance filter," Appl. Phys.Lett. 90, 081103(2007).
6. Y. -C. Lee, C. -F. Huang, J. -Y. Chang, and M. -L. Wu, "Enhanced light trapping based on guided mode resonance effect for thin-film silicon solar cells with two filling-factor gratings," Opt. Express 16, 7969-7975 (2008) http://www.opticsinfobase.org/abstract.cfm?URI=oe-16-11796
7. A. Sharon, D. Rosenblatt, A. A. Friesem, "Narrow spectral bandwidths with grating waveguide structures," Appl.Phys.Lett. 69, 4154-4156(1996)
8. A.-L. Fehrembach, A. Talneau, O. Boyko, F. Lemarchand and A. Sentenac, "Experimental demonstration of a narrow-band, angular tolerant, polarization independent, doubly periodic resonant grating filter," Opt. Lett. 32, 2269-2271(2007)
9. C. L. Hsu, M. L. Wu, Y. C. Liu, Y. C. Lee, J. Y. Chang, "Flattened broad-band notch filters using guided-mode resonance associated with asymmetric binary gratings," IEEE Photon. Technol. Lett. 18, 2572-2574(2006)
10. S. Hernandez, O. Gauthier-Lafaye, A.-L. Fehrembach, S. Bonnefont, P. Arguel, F. Lozes-Dupuy, A. Sentenac, "High performances 2D resonant grating filter at 850nm under high oblique incidence of 7sim;60," Appl.Phys.Lett. 92, 131112(2008)
11. Che-Lung Hsu; Yung-Chih Liu; Chih-Ming Wang; Mount-Learn Wu; Ya-Lun Tsai; Yue-Hong Chou; Chien- Chieh Lee; Jenq-Yang Chang, "Bulk-micromachined optical filter based on guided-mode resonance in silicon- nitride membrane," J. Lightwave Technol. 24, 1922-1928(2006)
12. Y. Kanamori, T. Kitani, K. Hane, "Control of guided resonance in a photonic crystal slab using microelectromechanical actuators," Appl. Phys. Lett. 90, 031911(2007)
13. Y. Kanamori, N. Matsuyama, K. Hane, "Resonant-wavelength tuning of a pitch-variable 1-D photonic crystal filter at telecom frequencies," IEEE Photon. Technol. Lett. 20, 1136(2008)
14. W. Suh, S. Fan, "All-pass transmission or flattop reflection filters using a single photonic crystal slab," Appl. Phys. Lett. 84,4905(2004)
15. K. B. Crozier, Virginie Lousse, Onur Kilic, Sora Kim, Shanhui Fan, and Olav Solgaard, "Air-bridged photonic crystal slabs at visible and near-infrared wavelengths," Phys. Rev. B 73, 115126 (2006)
16. J.-S. Ye, N. Matsuyama, Y. Kanamori, and K. Hane, "Silicon Suspended Resonant Grating Filters Fabricated From a Silicon-on-Insulator Wafer," IEEE Photon. Technol. Lett. 20, 851(2008)
17. M. G. Moharam and T. K. Gaylord, "Rigorous coupled-wave analysis of planar-grating diffraction." J. Opt. Soc. Am. 71,811-818(1981)
18. H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen, "Beaming Light from a Subwavelength Aperture," Science 297, 820-822(2002)
19. D. L. Brundrett, E. N. Glytsis, and T. K. Gaylord, "Normal-incidence guided-mode resonant grating filters: design and experimental demonstration," Opt. Lett. 23, 700-702(1998)
20. G. Niederer, W. Nakagawa, H. Herzig, and H. Thiele, "Design and characterization of a tunable polarization- independent resonant grating filter," Opt. Express 13, 2196-2200 (2005) http://www. opticsinfobase.org/oc/abstract.cfm?URI=oe-13-6-2196
21. N. Moll, S. Schönenberger, T. Stöferle, T. Wahlbrink, J. Bolten, T. Mollenhauer, C. Moormann, R. F. Mahrt, B. J. Offrein, "Circular Grating Resonators as Micro-Cavities for Optical Modulators," 4th IEEE International Conference on Group IV Photonics, Tokyo, Japan, pp. 1-3(2007).
22. R. D. Bhat, N. C. Panoiu, S. R. Brueck, R. M. Osgood, "Enhancing the signal-to-noise ratio of an infrared photodetector with a circular metal grating," Opt. Express 16,4588-4596 (2008) http://www. opticsinfobase.org/abstract.cfm/URI=oe-16-7-458
23. Eric Laux, Cyriaque Genet, Torbjorn Skauli, Thomas W. Ebbesen, "Plasmonic photon sorters for spectral and polarimetric imaging," Nature Photonics 2, 161-164(2008)