Applications of UV-nanoimprint soft stamps in fabrication of single-frequency diode lasers

Microelectronic Engineering

Volumn 86, Issue 3, 2009, Pages 321-324

  Viheriälä, Jukka ^a   Tommila, Juha ^a   Leinonen, Tomi ^a   Dumitrescu, Mihail ^a   Toikkanen, Lauri ^a   Niemi, Tapio ^a   Pessa, Markus ^a  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

Author keywords

DFB laser; Nanoimprint lithography; NIL; UV NIL

Indexed keywords

LASERS; SILICONES; TOLUENE;

DFB-LASER; DIODE LASERS; NIL; PATTERN DEFORMATIONS; RESIDUAL LAYER THICKNESS; RESIDUAL LAYERS; SIDE-MODE SUPPRESSION RATIOS; SINGLE FREQUENCIES; SINGLE-FREQUENCY LASERS; SOFT STAMPS; UV-NANOIMPRINT; UV-NANOIMPRINT LITHOGRAPHIES; UV-NIL;

NANOIMPRINT LITHOGRAPHY;

EID: 59049107432     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.10.010     Document Type: Article

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