Electron paramagnetic resonance and raman spectroscopy characterization of diamond films fabricated by HF CVD method

Crystal Research and Technology

Volumn 45, Issue 2, 2010, Pages 167-172

  Fabisiak, K ^a   Szreiber, M ^a   Uniszkiewicz, C ^a   Runka, T ^b   Kasprowicz, D ^b  

^a KAZIMIERZ WIELKI UNIVERSITY   (Poland)

^b POZNAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

EPR; Hot filament CVD; Microcrystalline diamond; Raman spectroscopy; SEM

Indexed keywords

BROAD BANDS; COMPARATIVE STUDIES; CVD DIAMOND FILMS; CVD METHOD; CVD REACTORS; DIAMOND QUALITY; ELECTRON PARAMAGNETIC RESONANCE; EPR SIGNALS; HOT FILAMENT CVD; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; METHYL ALCOHOLS; MICROCRYSTALLINE DIAMOND; PEAK LINEWIDTH; POLYCRYSTALLINE DIAMOND FILMS; RAMAN LINES; RAMAN SPECTRA; RAMAN SPECTROSCOPY CHARACTERIZATION; SEM; SILICON SUBSTRATES;

AMORPHOUS CARBON; CHEMICAL VAPOR DEPOSITION; DIAMOND CUTTING TOOLS; DIAMONDS; ELECTRON RESONANCE; ELECTRON SPIN RESONANCE SPECTROSCOPY; FILAMENTS (LAMP); METHANOL; PARAMAGNETIC MATERIALS; PARAMAGNETIC RESONANCE; PARAMAGNETISM; QUANTUM THEORY; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

DIAMOND FILMS;

EID: 76749141421     PISSN: 02321300     EISSN: 15214079     Source Type: Journal    
DOI: 10.1002/crat.200900406     Document Type: Article

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