SCOPUS 정보 검색 플랫폼

Volumn 88, Issue 9, 2002, Pages 950021-950024

Electron cyclotron resonance in a weakly magnetized radio-frequency inductive discharge

(3) Chung, ChinWook a Kim, S S a Chang, H Y a

a Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTROMAGNETIC FIELD EFFECTS; ELECTRON CYCLOTRON RESONANCE; ELECTRONS; KINETIC THEORY; MAGNETIC ANISOTROPY; RADIO WAVES; SKIN EFFECT; SUBSTRATES;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS (EEDF); ELECTRON HEATING;

INDUCTIVELY COUPLED PLASMA;

EID: 0037018081 PISSN: 00319007 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (34)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.