Electrically actuated sacrificial membranes for valving in microsystems

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Allain, M ^a,b   Berthier, J ^a   Basrour, S ^b   Pouteau, P ^a  

^a CEA LETI   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION TIME; BREAK-UP; EMBEDDED ELECTRODES; ENERGY INPUTS; LOW ENERGIES; MICRO-CHAMBERS; MICRO-FLOW; MICRO-SYSTEM TECHNOLOGIES; NEW DESIGN; PLATINUM ELECTRODES; SACRIFICIAL MATERIAL; SILICON CHIP;

ELECTRODES; MICROSYSTEMS; NETWORKS (CIRCUITS); PLATINUM;

MEMBRANES;

EID: 76449115210     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035006     Document Type: Article

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