A finite element method modeling approach for the development of metal/silicon nitride MEMS single-use valve arrays

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1671-1679

  Cardenas, Michelle L ^a,b   Cardenas Valencia, Andres M ^a   Dlutowski, Jay ^a   Bumgarner, John ^a   Langebrake, Larry ^a  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

^b SRI St Petersburg   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; HEAT TRANSFER; MICROFABRICATION; SILICON NITRIDE; TEMPERATURE MEASUREMENT;

COMSOL MULTIPHYSICS; OPTIMIZATION ROUTINE; SILICON NITRIDE MEMBRANES;

MEMS;

EID: 34547692898     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/034     Document Type: Article

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