Origin of damages in OLED from Al top electrode deposition by DC magnetron sputtering

Organic Electronics

Volumn 11, Issue 2, 2010, Pages 322-331

  Gil, Tae Hyun ^a   May, Christian ^a   Scholz, Sebastian ^b   Franke, Sebastian ^a   Toerker, Michael ^a   Lakner, Hubert ^a   Leo, Karl ^a   Keller, Stefan ^c  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^c Applied Materials GmbH and Co   (Germany)

Author keywords

DC magnetron sputtering; Ellipsometry; LDI TOF MS; Organic light emitting diode; SEM EDX; Sputter damage

Indexed keywords

DESORPTION; ELECTRODES; ELLIPSOMETRY; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; MASS SPECTROMETRY; ORGANIC LASERS; SCANNING ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

DC MAGNETRON SPUTTERING; DIRECT CURRENT MAGNETRON SPUTTERING; LASER INDUCED DESORPTION; LDI-TOF-MS; ORGANIC LIGHT EMITTING DIODES(OLEDS); SEM/EDX; SPUTTER DAMAGE; TIME OF FLIGHT MASS SPECTROMETRY;

ORGANIC LIGHT EMITTING DIODES (OLED);

EID: 76449099039     PISSN: 15661199     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.orgel.2009.11.011     Document Type: Article

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