Zirconium carbonitride films deposited by combined magnetron sputtering and ion implantation (CMSII)

Surface and Coatings Technology

Volumn 204, Issue 12-13, 2010, Pages 1889-1892

  Grigore, E ^a   Ruset, C ^a   Li, X ^b   Dong, H ^b  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Hard coatings; Magnetron sputtering; Tribological performance; Zirconium carbonitride coatings

Indexed keywords

ATOMIC RATIO; CARBONITRIDE COATINGS; CARBONITRIDES; CHEMICAL COMPOSITIONS; COMBINED MAGNETRON SPUTTERING; DC BIAS VOLTAGE; DEPOSITION CONDITIONS; DEPOSITION PROCESS; DUPLEX PROCESS; HIGH VOLTAGE PULSE; OPTICAL SPECTROMETRY; REACTIVE GAS; SEM; TRIBOLOGICAL PERFORMANCE; WEAR TEST;

BUTANE; CARBON NITRIDE; GLOW DISCHARGES; HYDROCARBONS; ION BOMBARDMENT; ION IMPLANTATION; LIQUEFIED PETROLEUM GAS; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; MAGNETRONS; MICROHARDNESS; SCANNING ELECTRON MICROSCOPY; TRIBOLOGY; WEAR RESISTANCE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM;

HARD COATINGS;

EID: 76349125314     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.11.012     Document Type: Article

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