Ion beam analysis of low-temperature MO-PACVD coatings

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 388-392

  Alberts, L ^a   Boscarino, D ^b   Patelli, A ^c   Rigato, V ^c   Ahn, H ^a   Rie, K T ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Thin Films srl   (Italy)

^c LABORATORI NAZIONALI DI LEGNARO   (Italy)

Author keywords

Desorption; Hydrogen; Metal organic; Plasma assisted chemical vapour deposition (PACVD)

Indexed keywords

COATINGS; DESORPTION; HYDROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STOICHIOMETRY;

DESORPTION CORRECTION FACTORS;

ION BEAMS;

COATING; ION IMPLANTATION; PLASMA TREATMENT; SURFACE TREATMENT; VAPOR DEPOSITION;

EID: 0037671433     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00062-8     Document Type: Article

References (15)

1. Boving H.J. Hintermann H.E. Thin Solid Films 153 1987 253 266
2. Pfohl C. Rie K.T. Surf. Coat. Technol. 116-119 1999 911 915
3. Pfohl C. Gebauer A. Rie K.T. Surf. Coat. Technol. 112 1999 114 117
4. Bulger J.M. Whelan C.S. Dumont A. Kuhn M. Clark J. J. Vac. Sci. Technol. B 17 2 1999 410 415
5. Panda S. Kim J. Weiller B.H. Economou D.J. Hoffman D.M. Thin Solid Films 357 1999 125 131
6. Wöhle J. Pfohl C. Rie K.-T. Gebauer-Teichmann A. Kim S.K. Surf. Coat. Technol. 131 2000 127
7. Intemann A. Dünnschichttechnologien '92 1992 102 107 VDI-Verlag Düsseldorf
8. Monelli A. Corni F. Queirolo G. J. Appl. Phys. 80 1996 109
9. Oliver W.C. Pharr G.M. J. Mater. Res. 7 6 1992 1565 1583
10. Doolittle L.R. Nucl. Instrum. Methods B 15 1986 227
11. Amirikas R. Jamieson D.N. Dooley S.P. Nucl. Instrum. Methods B 77 1993 1100
12. Rauhala E. Nucl. Instrum. Methods B 12 1985 447
13. Novikov N.V. Voronkin M.A. Dub S.N. et-al., Diamond Relat. Mater. 6 1997 574 578
14. Hainsworth S.V. Chandler H.W. Page T.F. J. Mater. Res. 11 8 1996 1987 1995
15. Ahn H. Alberts L. Waöhle J. Rie K.T. Surf. Coat. Technol. 142-144 2001 894