Fabrication and performance of silicon-embedded permanent-magnet microgenerators

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 4-13

  Herrault, Florian ^a   Yen, Bernard C ^b,c   Ji, Chang Hyeon ^a   Spakovszky, Zoltan S ^d   Lang, Jeffrey H ^d   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Department of Electrical Engineering and Computer Science   (United States)

^c BioScale   (United States)

^d MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

AC generators; Interconnects; Laminations; Microgenerator; Permanent magnets (PMs); Silicon packaging

Indexed keywords

BATCH FABRICATION; ELECTRICAL PERFORMANCE; ELECTROPLATED METALS; ESSENTIAL ELEMENTS; HIGH ROTATIONAL SPEED; INTEGRATED MAGNETICS; INTERCONNECTS; LAMINATIONS; MAXIMUM SPEED; MECHANICAL STRENGTH; MICROGENERATOR; MICROGENERATORS; OUTPUT POWER; POWER INCREASE; RESISTIVE LOADS; SPINDLE DRIVES; THROUGH-WAFER INTERCONNECTS;

AC GENERATORS; ASYNCHRONOUS MACHINERY; ELECTRONICS PACKAGING; FABRICATION; LAMINATING; MAGNETIC DEVICES; MICROELECTROMECHANICAL DEVICES; PACKAGING; PERMANENT MAGNETS; SEMICONDUCTING SILICON COMPOUNDS; SPEED; WAFER BONDING;

SILICON WAFERS;

EID: 76349106167     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2036583     Document Type: Article

References (29)

1. A. Epstein, S. D. Senturia, G. Anathasuresh, A. Ayon, K. Breuer, K.-S. Chen, F. Ehrich, G. Gauba, R. Ghodssi, C. Groshenry, S. Jacobson, J. Lang, C.-C. Mehra, J. Mur Miranda, S. Nagle, D. Orr, E. Piekos, M. Schmidt, G. Shirley, S. Spearing, C. Tan, Y.-S. Tzeng, and I. Waitz, "Power MEMS and microengines," in Proc. 9th Transducers, Jun. 1997, vol.2, pp. 753-756.
2. S. A. Jacobson and A. H. Epstein, "An informal survey of power MEMS," in Proc. Int. Symp. Micro-Mech. Eng. 2003, pp. 513-520.
3. O. Cugat, J. Delamare, and G. Reyne, "Magnetic micro-actuators and systems (MAGMAS)," IEEE Trans. Magn., vol.39, no.6, pp. 3607-3612, Nov. 2003.
4. S. Das, D. P. Arnold, I. Zana, J.-W. Park, M. G. Allen, and J. H. Lang, "Microfabricated high-speed axial-flux multiwatt permanent-magnet generators-Part I: Modeling," J. Microelectromech. Syst., vol.15, no.5, pp. 1330-1350, Oct. 2006.
5. D. P. Arnold, S. Das, J.-W. Park, I. Zana, J. H. Lang, and M. G. Allen, "Microfabricated high-speed axial-flux multiwatt permanent-magnet generators-Part II: Design, fabrication, and testing," J. Microelectromech. Syst., vol.15, no.5, pp. 1351-1363, Oct. 2006. (Pubitemid 44566953)
6. H. Raisigel, O. Cugat, and J. Delamare, "Permanent magnet planar microgenerators," Sens. Actuators A, Phys., vol.130, pp. 438-444, Aug. 2006.
7. D. P. Arnold, F. Herrault, I. Zana, P. Galle, J.-W. Park, S. Das, J. H. Lang, and M. G. Allen, "Design optimization of an 8 W, microscale, axial-flux, permanent magnet generator," J. Micromech. Microeng., vol.16, no.9, pp. S290-S296, Sep. 2006.
8. C. T. Pan and T. T. Wu, "Development of a rotary electromagnetic mi-crogenerator," J. Micromech. Microeng., vol.17, no.1, pp. 120-128, Jan. 2007.
9. F. Herrault, C.-H. Ji, and M. G. Allen, "Ultraminiaturized, highspeed, permanent magnet generators for milliwatt-level power generation," J. Microelectromech. Syst., vol.17, no.6, pp. 1376-1387, Dec. 2008.
10. I. Zana, F. Herrault, D. P. Arnold, and M. G. Allen, "Magnetic patterning of permanent-magnet rotors for microscale motor/generators," in Proc. 5th PowerMEMS, Dec. 2005, pp. 116-119.
11. D. P. Arnold, "Review of microscale magnetic power generation," IEEE Trans. Magn., vol.43, no.11, pp. 3940-3951, Nov. 2007.
12. F. Herrault, "Microfabricated air-turbine and heat-engine-driven permanent magnet generators," Ph.D. dissertation, Université de Toulouse-INSA, Toulouse, France, 2009.
13. A. Holmes, G. Hong, and K. Pullen, "Axial-flux permanent magnet machines for micropower generation," J. Microelectromech. Syst., vol.14, no.1, pp. 54-62, Feb. 2005.
14. F. Herrault, C.-H. Ji, S.-H. Kim, X. Wu, and M. G. Allen, "A microfluidic-electric package for power MEMS generators," in Proc. 21st IEEE MEMS, Tucson, AZ, Jan. 2008, pp. 112-115.
15. K. Isomura, S. Tanaka, S. Togo, and M. Esashi, "Development of highspeed micro-gas bearings for 3-D micro-turbo machines," J. Micromech. Microeng., vol.15, no.9, pp. S222-S227, Sep. 2005.
16. C. Lee, M. Liamini, and L. G. Frechette, "Design, fabrication, and characterization of a microturbopump for a Rankine cycle micro power generator," in Proc. Solid-State Sensor, Actuator, Microsyst. Workshop, Hilton Head, SC, Jun. 2006.
17. A. H. Epstein, "Millimeter-scale, MEMS gas turbine engines," ASME J. Eng. Gas Turbines Power, vol.126, pp. 205-226, Apr. 2004.
18. C. J. Teo, L. X. Liu, H. Q. Li, L. C. Ho, S. A. Jacobson, F. F. Ehrich, A. H. Epstein, and Z. S. Spakovszky, "High-speed operation of a gas-bearing supported MEMS-air turbine," J. Tribol., vol.131, no.3, pp. 032001-1-032001-9, Jul. 2009.
19. F. Herrault, D. P. Arnold, I. Zana, P. Galle, and M. G. Allen, "High temperature operation of multi-watt, axial-flux, permanent-magnet generators," Sens. Actuators A, Phys., vol.148, no.1, pp. 299-305, Nov. 2008.
20. B. C. Yen, F. Herrault, K. J. Hillman, M. G. Allen, F. F. Ehrich, S. Jacobson, C.-H. Ji, J. H. Lang, H. Li, Z. S. Spakovsky, and D. R. Veazie, "Characterization of a fully-integrated permanent-magnet turbine generator," in Proc. 8th PowerMEMS, Dec. 2008, pp. 121-124.
21. B. C. Yen, "A fully-integrated multi-watt permanent-magnet turbine generator," Ph.D. dissertation, EECS, MIT, Cambridge, MA, 2008.
22. D. P. Arnold, F. Cros, I. Zana, D. R. Veazie, and M. G. Allen, "Electroplated metal microstructures embedded in fusion-bonded silicon: Conductors and magnetic materials," J. Microelectromech. Syst., vol.13, no.5, pp. 791-798, Oct. 2004.
23. N. P. Pham, J. N. Burghartz, and P. M. Sarro, "Spray coating of photoresist for pattern transfer on high topography surfaces," J. Micromech. Micro-eng., vol.15, no.4, pp. 691-697, Apr. 2005.
24. C.-H. Ji, F. Herrault, and M. G. Allen, "A metallic buried interconnect process for through-wafer interconnection," J. Micromech. Microeng., vol.18, no.8, p. 085016, Aug. 2008.
25. S. Linder, H. Baltes, F. Gnaedinger, and E. Doering, " Photolithography in anisotropically etched grooves," in Proc. 9th IEEE MEMS, Feb. 1996, pp. 38-43.
26. F. Herrault, C.-H. Ji, S. Rajaraman, R. H. Shafer, and M. G. Allen, "Electrodeposited metal structures in high aspect ratio cavities using vapor deposited polymer molds and laser micromachining," in Proc. 14th Transducers, Jun. 2007, pp. 513-516.
27. D. P. Arnold, I. Zana, and M. G. Allen, "Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon," J. Micromech. Microeng., vol.15, no.5, pp. 971-977, May 2005.
28. J.-W. Park and M. G. Allen, "Ultralow-profile micromachined power inductors with highly laminated Ni/Fe cores: Application to low-megahertz dc-dc converters," IEEE Trans. Magn., vol.39, no.5, pp. 3184-3186, Sep. 2003.
29. D. P. Arnold, "Magnetic machines for microengine power generation," Ph.D. dissertation, ECE, Georgia Inst. Technol., Atlanta, GA, 2004.