Frequency effect on voltage linearity of ZrO2-based RF metalInsulator-metal capacitors

IEEE Electron Device Letters

Volumn 31, Issue 2, 2010, Pages 114-116

  Bertaud, Thomas ^a,b   Blonkowski, Serge ^c   Bermond, Cédric ^a   Vallée, Christophe ^b   Gonon, Patrice ^b   Gros Jean, Michaël ^c   Fléchet, Bernard ^a  

^a UNIVERSITÉ DE SAVOIE   (France)

^b Laboratoire Interdisciplinaire de Physique   (France)

^c STMICROELECTRONICS   (France)

Author keywords

Dielectric materials; Metal insulator metal (MIM) devices; Microwave measurement; Zirconium

Indexed keywords

FREQUENCY EFFECT; METAL INSULATOR METALS; METAL-INSULATOR-METAL (MIM) DEVICES; METAL-INSULATOR-METAL CAPACITORS; VOLTAGE LINEARITY; VOLTAGE-CAPACITANCE; WIDE BAND FREQUENCIES;

CAPACITANCE; CAPACITORS; LINEARIZATION; METAL INSULATOR BOUNDARIES; METALS; MICROWAVE MEASUREMENT; MICROWAVES; MIM DEVICES; SEMICONDUCTOR INSULATOR BOUNDARIES; ZIRCONIUM; ZIRCONIUM ALLOYS;

DIELECTRIC MATERIALS;

EID: 75749116656     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2009.2036275     Document Type: Article

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