Nanostructured surface fabricated by laser interference lithography to attenuate the reflectivity of microlens arrays

Journal of the European Optical Society

Volumn 5, Issue , 2010, Pages

  Baroni, P Y ^a   Paivanranta B ^b   Scharf, T ^a   Nakagawa, W ^c   Roussey, M ^a   Kuittinen, M ^b   Herzig, H P ^a  

^a EPFL   (Switzerland)

^b UNIVERSITY OF EASTERN FINLAND   (Finland)

^c Idaho National Laboratory   (United States)

Author keywords

Antireflective; Interference photolithography; Microlens; Nanostructure

Indexed keywords

EID: 75649129631     PISSN: None     EISSN: 19902573     Source Type: Journal    
DOI: 10.2971/jeos.2010.10006     Document Type: Article

References (17)

1. D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, The manufacture of microlenses by melting photoresist Meas. Sci. Technol. 1, 759-766 (1990).
2. Ph. Nussbaum, R. Völkel, H. P. Herzig, M. Eisner, and S. Haselbeck, "Design, fabrication and testing of microlens arrays for sensors and microsystems" Pure Appl. Opt. 6, 617-636 (1997).
3. V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, F. Carcenac, H. Ottevaere, and H. Thienpont, Fabrication and characterization of microlens arrays using a cantilever-based spotter Opt. Express 15, 6900-6907 (2007).
4. S. Calixto, Silicone microlenses and interference gratings Appl. Opt. 41, 3355-3361 (2002).
5. B. Päivänranta, P.-Y. Baroni, T. Scharf, W. Nakagawa, M. Kuittinen, and H. P. Herzig, Antireflective nanostructured microlenses Microelectron. Eng. 85, 1089-1091 (2008).
6. M. Karlsson, and F. Nikolajeff, Diamond micro-optics: microlenses and antireflection structured surfaces for the infrared spectral region Opt. Express 11, 502-507 (2003).
7. C. J. M. van Rijn, Laser interference as a lithographic nanopatterning tool J. Microlith. Microfab. 5, 011012 (2006).
8. B. Päivänranta, N. Heikkilä, and M. Kuittinen, Antireflective subwavelength-structured surfaces with enhanced color properties J. Opt. Soc. Am. A 24, 1680-1686 (2007).
9. T. Clausnitzer, T. Kämpfe, E.-B. Kley, A. Tünnermann, A. V. Tishchenko, and O. Parriaux, Highly-dispersive dielectric transmission gratings with 100% diffraction efficiency Opt. Express 16, 5577-5584 (2008).
10. S. Traut, M. Rossi, and H. P. Herzig, Replicated arrays of hybrid elements for application in a low-cost micro-spectrometer array J. Mod. Opt. 47, 2391-2397 (2000).
11. H. Ottevaere, R. Cox, H. P. Herzig, T. Miyashita, K. Naessens, M. Taghizadeh, R. Völkel, H. J. Woo, and H. Thienpont, Comparing glass and plastic refractive microlenses fabricated with different technologies J. Opt. A-Pure Appl. Op. 8, 407-429 (2006).
12. B. Päivänranta, M. Pudas, O. Pitkänen, K. Leinonen, M. Kuittinen, P.-Y. Baroni, T. Scharf, and H. P. Herzig, Liquid phase deposition of polymers on arbitrary shaped surfaces and their suitability for e-beam patterning Nanotechnology 20, 225305 (2009).
13. P.-Y. Baroni, T. Scharf, and H. P. Herzig, "Fabrication of large-area two-dimensional photonic crystals using interference lithography and direct writing of defects" Proc. SPIE 6182, 61821V(2006).
14. S. Traut, and H. P. Herzig, Holographically recorded gratings on microlenses for a miniaturized spectrometer array Opt. Eng. 39, 290-298 (2000).
15. H. Sickinger, J. Schwider, and B. Manzke, Fiber based Mach-Zehnder interferometer for measuring wave aberrations of microlenses Optik 110, 239-243 (1999).
16. M. Born, and E. Wolf, Principles of Optics (Cambridge University Press, Cambridge, 1999).
17. D. H. Raguin, and G. M. Morris, Structured surfaces mimic coating performance Laser Focus World 33, 113-117 (1997).