Liquid phase deposition of polymers on arbitrary shaped surfaces and their suitability for e-beam patterning

Nanotechnology

Volumn 20, Issue 22, 2009, Pages

  Paivanranta B ^a   Pudas, M ^b   Pitkanen O ^b   Leinonen, K ^a   Kuittinen, M ^a   Baroni, P Y ^c   Scharf, T ^c   Herzig, H P ^c  

^a UNIVERSITY OF EASTERN FINLAND   (Finland)

^b UNIVERSITY OF OULU   (Finland)

^c UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION OF; DIELECTRIC SUBSTRATES; E-BEAM PATTERNING; ELECTRON-BEAM EXPOSURE; ETHYL ACRYLATES; FLAT SURFACES; LIQUID PHASE DEPOSITION METHOD; LIQUID-PHASE DEPOSITION; LOW COSTS; METHYL METHACRYLATES; NANOSCALE FEATURES; POLYMER LAYERS; POLYMER LIQUIDS; SENSITIVE POLYMERS; THICKNESS OF THE FILM;

DIELECTRIC MATERIALS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRONS; ESTERS; LIQUIDS; MOLECULAR WEIGHT; POLYMERS; SUBSTRATES;

POLYMER FILMS;

COPOLYMER; METHACRYLIC ACID METHYL ESTER; NANOCOATING; NANOMATERIAL; POLY(METHYL METHACRYLATE CO ETHYL ACRYLATE); POLY(METHYL METHACRYLATE); UNCLASSIFIED DRUG;

ARTICLE; CONTROLLED STUDY; ELECTRON BEAM; ELECTRON BEAM LITHOGRAPHY; FILM; LASER; LIQUID; LIQUID PHASE DEPOSITION; MOLECULAR WEIGHT; NANOANALYSIS; NANOTECHNOLOGY; PRIORITY JOURNAL;

EID: 67649154126     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/22/225305     Document Type: Article

References (16)

1. Karlsson M and Nikolajeff F 2003 Opt. Express 11 502-7
2. Tseng A A 2004 J. Magn. Magn. Mater. 14 R15-34
3. Radtke D and Zeitner U D 2007 Opt. Express 15 1167-74
4. Park M, Chaikin P M, Register R A and Adamson D H 2001 Appl. Phys. Lett. 79 257-9
5. Picard Y N, Adams D P, Vasile M J and Ritchey M B 2003 Prec. Eng. 27 59-69
6. Kley E B, Thoma F, Zeitner U D, Wittig L and Aagedal H 1998 SPIE Proc. 3276 254-62
7. Broers A N, Hoole A C F and Ryan J M 1996 Microelectron. Eng. 32 131-42
8. Yang H, Jin A, Luo Q, Gu C and Cui Z 2007 Microelectron. Eng. 84 1109-12
9. Pham N P, Boellard E, Sarro P M and Burghartz J N 2002 Proc. 5th Semiconductor Advances for Future Electronics Workshop pp81-6
10. Babin S and Koops H W P 1996 J. Vac. Sci. Technol. B 14 3860-3
11. Hu W W, Sarveswaran K, Lieberman M and Bernstein G H 2004 J. Vac. Sci. Technol. B 22 1711-6
12. Klein L C 1988 Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics, and Specialty Shapes (New Jersey: Noyes Publications)
13. http://www.sigmaaldrich.com
14. http://www.roehm.de
15. Daly D 1990 Meas. Sci. Technol. 1 1 759-66
16. Lathi B P 1998 Modern Digital and Analog Communication Systems (Oxford: Oxford University Press)