Mechanisms of hydrogen-induced degradation in ferroelectric thin films for ferroelectric random access memory applications

Journal of the Korean Physical Society

Volumn 42, Issue SUPPL., 2003, Pages

  Noh, T W ^a   Seo, S ^a   Kang, B S ^a   Kim, J D ^a   Yoon, J G ^a,c   Lee, Y K ^b   Park, Y S ^b  

^a Seoul National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Suwon University   (South Korea)

Author keywords

Decomposition; Defects; Ferroelectric; Forming gas; Hydrogen; Memory

Indexed keywords

EID: 7544222584     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (16)

1. Sung-Yung Lee, Bon-Jae Koo, Dong-Jin Jung and Kinam Kim, J. Korean Phys. Soc. 35, S783 (1999). J. Im, O. Auciello, A. R. Krauss, D. M. Gruen, R. P. H. Chang, S. H. Kim and A. I. Kingon, Appl. Phys. Lett. 74, 1162 (1998).
2. Sung-Yung Lee, Bon-Jae Koo, Dong-Jin Jung and Kinam Kim, J. Korean Phys. Soc. 35, S783 (1999). J. Im, O. Auciello, A. R. Krauss, D. M. Gruen, R. P. H. Chang, S. H. Kim and A. I. Kingon, Appl. Phys. Lett. 74, 1162 (1998).
3. J. Im, O. Auciello, A. R. Krauss, D. M. Gruen, R. P. H. Chang, S, H. Kim and A. I. Kingon, Appl. Phys. Lett. 74, 1162 (1998).
4. S. Aggarwal, S. R. Perusse, C. J. Kerr, R. Ramesh, D. B. Romero, J. T. Evans, Jr., L. Boyer and G. Velasquez, Appl. Phys. Lett. 76, 918 (2000).
5. C. H. Park and D. J. Chadi, Phys. Rev. Lett. 84, 4717 (2000).
6. C. H. Park and D. J. Chadi, J. Korean Phys. Soc. 35, S1133 (1999).
7. June-Mo Koo, Ilhwan Bang, Tae Ho Kim, Jae-Gab Lee and Jiyoung Kim, J. Korean Phys. Soc. 38, 273 (2001).
8. June-Mo Koo, Noh-Heon Park, Juwhan Park, Won Hee Lee, Jae-Gab Lee and Jiyoung Kim, J. Korean Phys. Soc. 40, 729 (2002).
9. Dongjin Jung and Kinam Kim, J. Korean Phys. Soc. 39, 80 (2001).
10. B. H. Park, B. S. Kang, S. D. Bu, T. W. Noh, J. Lee and W. Jo, Nature 401, 682 (1999).
11. S. Seo, Ph. D. thesis, 2002.
12. C. Yoshida, T. Tamura, K. Kondo and K.Takasaki, Appl. Phys. Lett 79, 1339 (2001).
13. T. Tamura, K. Matsuura, H. Ashida, K. Kondo and S. Otani, Appl. Phys. Lett. 74, 3395 (1999).
14. Y. Shimakawa and Y. Kubo, Appl. Phys. Lett. 75, 2839 (1999).
15. S. Seo, J.-G. Yoon, T. K. Song, J. D. Kim, B. S. Kang, T. W. Noh, Y. K. Lee, Ch. J. Kim, I. S. Lee, J. K. Lee and Y. S. Park, Appl. Phys. Lett, (in press).
16. S. Seo, J.-G. Yoon, T. K. Song, B. S. Kang, T. W. Noh, Y. K. Lee, C. J. Kim and Y. S. Park, Appl. Phys. Lett. 81, 697 (2002).