Effects of hybrid structure top electrodes of pzt capacitors on hydrogen-induced damage

Journal of the Korean Physical Society

Volumn 38, Issue 3, 2001, Pages 273-276

  Koo, June Mo ^a   Bang, Ilhwan ^a   Kim, TaeHo ^a   Lee, Jae Gab ^a   Kim, Jiyoung ^a  

^a Kookmin University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035532413     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

1. H. Ishiwara, J. Korean Phys. Soc. 32, S1349 (1998).
2. S. Y. Kweori, S. J. Yeon, N. K. Kim, H. J Sun, Y. S. Yu and S. K. Lee, J. Korean Phys. Soc. 35, S110 (1999).
3. H. S. Kim, I. B. and J. Kim, J. Korean Phys. Soc. 35, S123 (1999).
4. R. Khamankar, J. Kim, B. Jiang, C. Sudhama, P. Maniar, R. Jones and J. Lee, 1994 IEDM Tech. Digest, 337 (1994).
5. K. Kushida-Abdelghafar, H. Miki, F. Yano and Y. Fujisaki, Appl. Phys. Lett. 69(21), 3188 (1996).
6. Y. Shimamoto, K. Kushida-Abdelghafar, H. Miki and Y. Fujisaki, Appl. Phys. Lett. 70(23), 3096 (1997).
7. K. Takenaka and A. Fujisawa, US Patent #5523595 (1996).
8. th International VLSI Multilevel Interconnection Conference Proceeding, p. 376 (1995).
9. T. Nakamura, Y. Nakao, A. Kamisawa and H. Takasu, Jpn. J. Appl. Phys. 33-I(9B), 5207 (1994).
10. M. Shimizu, H. Fujisawa, S. Hyodo, S. Nakashima, H. Niu, H. Okino and T. Shiosaki, J. Korean Phys. Soc. 32, S1349 (1998).
11. J. C. Vickerman, Surface Analysis-The Principal Techniques (Wiley, West Sussex/England, 1997), p. 46.
12. J. Moulder, W. Stickle, P. Sobol and K. Bomben, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer, Minnesota/USA, 1992).
13. S. Takatani, H. Miki, K. Kushida-Abdelghafar and K. Torii, J. Appl. Phys. 85(11), 7784 (1999).