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Volumn 40, Issue 4, 2002, Pages 729-732
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Degradation of ferroelectric capacitors during forming gas annealing
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Author keywords
Ferroelectrics; Hydrogen; Lattice parameter; XPS
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Indexed keywords
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EID: 0036011367
PISSN: 03744884
EISSN: None
Source Type: Journal
DOI: 10.3938/jkps.40.729 Document Type: Conference Paper |
Times cited : (7)
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References (11)
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