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Volumn 40, Issue 4, 2002, Pages 729-732

Degradation of ferroelectric capacitors during forming gas annealing

Author keywords

Ferroelectrics; Hydrogen; Lattice parameter; XPS

Indexed keywords


EID: 0036011367     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.40.729     Document Type: Conference Paper
Times cited : (7)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.