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Volumn 94, Issue 3, 2010, Pages 432-435

Input silane concentration effect on the a-Si:H to μ c - Si : H transition width

Author keywords

Microstructure transition; Silane hydrogen discharge; Silicon thin film

Indexed keywords

A-SI:H; ANALYTICAL MODEL; DEPLETION LEVEL; ELECTRON DENSITIES; SEMI-EMPIRICAL APPROACH; SILANE CONCENTRATIONS; SILANE-HYDROGEN DISCHARGE; SILICON THIN FILM; TRANSITION WIDTHS;

EID: 75149162766     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2009.10.021     Document Type: Article
Times cited : (3)

References (14)
  • 1
    • 0038446352 scopus 로고    scopus 로고
    • Microcrystalline materials and cells deposited by RF glow discharge
    • Kondo M. Microcrystalline materials and cells deposited by RF glow discharge. Solar Energy Mater. Solar Cells 78 (2003) 543-566
    • (2003) Solar Energy Mater. Solar Cells , vol.78 , pp. 543-566
    • Kondo, M.1
  • 3
    • 33845936791 scopus 로고    scopus 로고
    • Directly deposited nanocrystalline silicon thin-film transistors with ultra high mobilities
    • Lee C.-H., Sazonov A., Nathan A., and Robertson J. Directly deposited nanocrystalline silicon thin-film transistors with ultra high mobilities. Appl. Phys. Lett. 89 (2006) 252101
    • (2006) Appl. Phys. Lett. , vol.89 , pp. 252101
    • Lee, C.-H.1    Sazonov, A.2    Nathan, A.3    Robertson, J.4
  • 5
    • 0023421273 scopus 로고
    • Influence of plasma excitation frequency for a-Si:H deposition
    • Curtins H., Wyrsch N., Favre M., and Shah A. Influence of plasma excitation frequency for a-Si:H deposition. Plasma Chem. Plasma Proc. 7 (1987) 267-273
    • (1987) Plasma Chem. Plasma Proc. , vol.7 , pp. 267-273
    • Curtins, H.1    Wyrsch, N.2    Favre, M.3    Shah, A.4
  • 7
    • 33748444007 scopus 로고    scopus 로고
    • High-rate microcrystalline silicon deposition for p-i-n junction solar cells
    • Matsui T., Matsuda A., and Kondo M. High-rate microcrystalline silicon deposition for p-i-n junction solar cells. Solar Energy Mater. Solar Cells 90 (2006) 3199-3204
    • (2006) Solar Energy Mater. Solar Cells , vol.90 , pp. 3199-3204
    • Matsui, T.1    Matsuda, A.2    Kondo, M.3
  • 10
    • 21344452776 scopus 로고    scopus 로고
    • Influence of substrate's surface morphology and chemical nature on the nucleation and growth of microcrystalline silicon
    • Vallat-Sauvain E., Bailat J., Meier J., Niquille X., Kroll U., and Shah A. Influence of substrate's surface morphology and chemical nature on the nucleation and growth of microcrystalline silicon. Thin Solid Films 485 (2005) 77-81
    • (2005) Thin Solid Films , vol.485 , pp. 77-81
    • Vallat-Sauvain, E.1    Bailat, J.2    Meier, J.3    Niquille, X.4    Kroll, U.5    Shah, A.6
  • 14
    • 34548320048 scopus 로고    scopus 로고
    • Fast equilibration of silane/hydrogen plasmas in large area RF capacitive reactors monitored by optical emission spectroscopy
    • Howling A.A., Strahm B., Colster P., Sansonnens L., and Hollenstein Ch. Fast equilibration of silane/hydrogen plasmas in large area RF capacitive reactors monitored by optical emission spectroscopy. Plasma Sources Sci. Technol. 16 (2007) 679-696
    • (2007) Plasma Sources Sci. Technol. , vol.16 , pp. 679-696
    • Howling, A.A.1    Strahm, B.2    Colster, P.3    Sansonnens, L.4    Hollenstein, Ch.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.