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Volumn 19, Issue 1, 2009, Pages 3-14

Revolutionary nanoelectronic devices and processes for post 32nm CMOS era

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE DEVICES; DEVICE PERFORMANCE; HIGH MOBILITY MATERIALS; HIGH- K; METAL-GATE; NANOELECTRONIC DEVICES; PERFORMANCE ENHANCEMENTS; TECHNOLOGY NODES;

EID: 74949121953     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3118926     Document Type: Conference Paper
Times cited : (4)

References (24)
  • 3
    • 85184373171 scopus 로고    scopus 로고
    • B. J. Cho et al.: ISAGST, Austin, TX (2007)
    • B. J. Cho et al.: ISAGST, Austin, TX (2007)
  • 4
    • 85184355713 scopus 로고    scopus 로고
    • C.S. Park et al.: ibid
    • C.S. Park et al.: ibid
  • 6
    • 85184383982 scopus 로고    scopus 로고
    • Process Integration and Electrical Properties of Bilayer Metal Gate/High-k MOSFETs
    • PhD Thesis, Stanford University
    • C-H. Lu, "Process Integration and Electrical Properties of Bilayer Metal Gate/High-k MOSFETs", PhD Thesis, Stanford University, (2007).
    • (2007)
    • Lu, C.-H.1
  • 15
    • 56849087931 scopus 로고    scopus 로고
    • D.G. Schlom et al., MRS Bull. 33, 1017 (2008)
    • (2008) MRS Bull , vol.33 , pp. 1017
    • Schlom, D.G.1
  • 19
  • 21
    • 85184380512 scopus 로고    scopus 로고
    • Intel announcement, January, 2007
    • Intel announcement, January, 2007
  • 24
    • 85184355168 scopus 로고    scopus 로고
    • D. Kuzum et al., IEDM Technical Digest, p. 723, Washington DC (2007)
    • D. Kuzum et al., IEDM Technical Digest, p. 723, Washington DC (2007)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.