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Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 6, Issue SUPPL. 2, 2009, Pages

MOVPE growth of InN: A comparison between a horizontal and a vertical reactor

(8) Liu, Yuhuai a,c Kimura, Takeshi a,c Shimada, Taka Aki a Hirata, Masaki a Wakaba, Masaki a Nakao, Masashi b,c Ji, Shi Yang a Matsuoka, Takashi a,c

a TOHOKU UNIVERSITY (Japan)

b NATIONAL INSTITUTE OF INFORMATION AND COMMUNICATIONS TECHNOLOGY (Japan)

c JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER GAS FLOW RATES; FLOW CHANNELS; GAS FLOWS; GAS-PHASE REACTIONS; HIGH CONCENTRATION; HORIZONTAL REACTORS; LAYER THICKNESS; MOVPE GROWTH; POLYCRYSTALLINE PHASE; SOURCE GAS; SUBSTRATE SURFACE; V/III RATIO; VERTICAL REACTOR;

DIAMOND FILMS; FLOW OF GASES; GROWTH TEMPERATURE; METALLORGANIC VAPOR PHASE EPITAXY; PHASE DIAGRAMS;

GASES;

EID: 74549134534 PISSN: 18626351 EISSN: 16101642 Source Type: Journal
DOI: 10.1002/pssc.200880914 Document Type: Article

Times cited : (8)

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