Photolithographic synthesis of high-density DNA probe arrays: Challenges and opportunities

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2537-2546

  Pawloski, Adam R ^a   McGall, Glenn ^a   Kuimelis, Robert G ^a   Barone, Dale ^a   Cuppoletti, Andrea ^a   Ciccolella, Paul ^a   Spence, Eric ^a   Afroz, Farhana ^a   Bury, Paul ^a   Chen, Christy ^a   Chen, Chuan ^a   Pao, Dexter ^a   Le, Mary ^a   McGee, Becky ^a   Harkins, Elizabeth ^a   Savage, Michael ^a   Narasimhan, Sim ^a   Goldberg, Martin ^a   Rava, Richard ^a   Fodor, Stephen P A ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED PROJECTION LITHOGRAPHY SYSTEMS; MOLECULAR MEDICINE; PHOTOACTIVATED SYNTHESIS REAGENTS;

PHOTOLITHOGRAPHY; POLYMER FILMS; SYNTHESIS (CHEMICAL);

DNA;

EID: 37149007041     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2794325     Document Type: Article

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