Step-and-scan maskless lithography for ultra large scale DNA chips

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 834-837

  Negrete, Omar D ^a   Cerrina, Franco ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

DNA microarrays; DNA synthesis; Maskless photolithography; Oligonucleotide synthesis; Overlay

Indexed keywords

DNA SEQUENCES; FLUORESCENCE MICROSCOPY; IMAGING SYSTEMS; LENSES; MICROSCOPES; PHOTOLITHOGRAPHY;

DNA MICROARRAYS; DNA SYNTHESIS; MASKLESS PHOTOLITHOGRAPHY; OLIGONUCLEOTIDE SYNTHESIS;

BIOCHIPS;

EID: 44149099589     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.014     Document Type: Article

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